Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Table of Contents

S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge

For post-stoppage positioning and locking

Clamping Force Specifications W-R1-S2Type Type 1 Type 3 Mass of transferred object 1000 kg or less 3000 kg or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure

Aluminum High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

CY1

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact point will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 7. Do not use in an area where surges are generated.

CYP

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 5. Do not use in an area where surges are generated. 1.

CYPSeries

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 5. Do not use in an area where surges are generated. 1.

CYPSeries

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 5. Do not use in an area where surges are generated. 1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

ZSE1/ISE1

) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

VQ5000

0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

PSE540/560

Do not drop, bump, or apply excessive impact (PSE540: 980 m/s2, PSE560: 500 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is 50 N. Applying a greater pulling force to it can cause malfunction.

Low Differential Pressure Sensor

Do not drop, bump, or apply excessive impact (100 m/s2) while handling. Although the body of the controller case may not be damaged, the inside of the controller could be damaged and cause malfunction. 2. The tensile strength of the power supply/output connection cable is 50 N; that of the pressure sensor lead wire with connector is 25 N.

PSE550/300

Do not drop, bump, or apply excessive impact (100 m/s2) while handling. Although the body of the controller case may not be damaged, the inside of the controller could be damaged and cause malfunction. 2. The tensile strength of the power supply/output connection cable is 50 N; that of the pressure sensor lead wire with connector is 25 N.

Power Clamp Cylinder

Wiring Diagram Black S1 Lood Blue () 4 3 S2 Lood 1 2 (+) Brown White Note) Both TURCK and P&F are common. 193 Series CKZT Caution 1. When mounted vertically, the maximum opening angle is different from the standard specifications. The opening angle is different from standard specifications depending on the arm offset, bore size and clamp arm. Refer to the following for details.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

HRL

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Read the operation manual completely before operation, and keep this manual where it can be referred to as necessary. 14) In locations where strong impacts or vibrations occur 15)

CE

When excessive impact (300m/s2 or more) is applied to a reed switch during operation, the contact point will malfunction and generate or cut off a signal momentarily (1ms or less). Consult SMC regarding the need to use a solid state switch depending upon the environment. 7. Do not use in an area where surges are generated.

A

Standard G Centralized Piping Type 1001~ 3000 +2.8 Port Size Front/side M5x0.8 M5 x0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Bottom (centralized) 4 4 5 6 8 10 11 The Operating Speed must not exceed 1000mm/s when air cushion alone is used.