Interface Regulator for VQ4000 5 Port Solenoid Valve

1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure

Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

XL

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: A (10m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: B (Lock), Cover: w/o Cover, Cable Type: S (Standard), Cable Length: A (10m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 200mm, Motor Option: B (Lock), Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: B (Lock), Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 200mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 600mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 700mm, Motor Option: None, Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 200mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 400mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 500mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 1000mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 200mm, Motor Option: B (Lock), Cover: w/o Cover, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: B (Size 40: 8mm, Size 63: 10mm, Size 100: 10mm), Stroke: 800mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 5m, Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (Connector)