Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1500mm, Motor Option: Lock, Cover: w/o Cover, Cable Type: Standard, Cable Length: 10m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1500mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 10m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 10m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 700mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 10m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 700mm, Motor Option: Lock, Cover: w/o Cover, Cable Type: Standard, Cable Length: 10m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: Connector, Option: -

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 100mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting: In-line Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 500mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 25, Motor Mounting: Top Mounting Type, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 100mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 25, Motor Mounting: Top Mounting Type, Motor Type: S2 [AC Servo Motor, (Incremental Encoder), Output 100W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 50mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 350mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 350mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 50mm, Motor Option: w/Lock, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Size: 32, Motor Mounting: In-line Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: w/Lock, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 10m, Controller Type: LECSA1, 100V to 120V, I/O Connector: w/Connector

Series: LEFB (Belt Drive), Size: 25, Motor Mounting Position: Top Mounting Type, AC Servo Motor: S2 (100W Ouput, Incremental Encoder), Lead: S, Stroke: 2000mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: S (Standard Cable), Cable Length: A (10m), Driver: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (w/Connector)

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 150mm, Motor Option: w/o Option, Rod End: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: F (Rod Flange), Actuator Cable Type: S (Standard Cable), Cable Length: A (10m), Controller Type: A1 (LECSA1, 100V to 120V), I/O

Air Cylinder

I J 20 Up to 350 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 25 Up to 400 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 32 Up to 450 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 40 Up to 800 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 50 Up to 1200 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25

42

0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

1

D-X Shock absorber 20Data ZZ + Stroke S MH ZZ Bore (mm) 20 25 32 40 50 63 Stroke range Shock absorber 10 to 350 RBAC0806 77 23.5 135.5 10 to 400 RBAC1007 77 31 148 15 to 450 RBAC1412 55 79 174 15 to 800 RBAC2015 62.5 87 199.5 15 to 1200 RBAC2015 102 55.5 215.5 25 to 1200 RBAC2725 92.5 102 252.5 6-17-97 78 Made to Order Common Specifications: -XC51: With Hose Nipple -XC52: Mounting Nut with