Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..

SMC Basic Pneumatics

I I I 3.886 4.661 5.436 6.2t1 Table 6.19 Theoretical Air Consumption ot double acting cylinders from 20 to 100 mm dia, in liters per 100 mm stroke Example 1.

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

CQS

Thus, it can be used in a Class 100 clean room.

XL

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

•

~me~~'U~ rl ~a~ca"--L_ ___'~O~O '--__-r_ -c~-c~c-~__ r -D-A30 ti I Different surfaces 35 + 30~n _ 2) 110 + 3O(n 2) DG39 ~ 1" =2.4. 6.8"-) D-K39 ~ Same surface 100 + 1oo(n _ 2) 110 + 100{n 2) 1-"->-"-==::---+-,,;---+-_--"'1 "-= = -= 27 .4"',6"'."

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

Microspeed Cylinder

The chamber is set up on a Class 100 clean bench.

Multistage Ejector Series ZL112/212 1

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Rated Flow Range: 3 (5 to 200 L/min), Output Specifications: K (OUT: Analog 4 to 20 mA; Remote Type Sensor Unit), Port Size: 8 (1; Applicable to LFE3), Thread: N (NPT), Option: Lead Wire w/M12 Connector; L/min Unit Specification, Insulation Type: None, Piping Port is connected to Negative Ground of the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Rated Flow Range: 1 (0.5 to 20 L/min), Output Specifications: J (OUT: Analog 1 to 5 V; Remote Type Sensor Unit), Port Size: 4 (1/2; Applicable to LFE1), Thread: Rc, Option: 2 (Lead Wire w/M12 Connector; Bracket; L/min Unit Specification), Insulation Type: None, Piping Port is connected to Negative Ground of the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Rated Flow Range: 3 (5 to 200 L/min), Output Specifications: K (OUT: Analog 4 to 20 mA; Remote Type Sensor Unit), Port Size: 8 (1; Applicable to LFE3), Thread: N (NPT), Option: 2 (Lead Wire w/M12 Connector; Bracket; L/min Unit Specification), Insulation Type: Z (Piping Port is Insulated with the Power Supply), Piping Connection: X8 (Stainless Steel 304)

Connection, IN OUT: 0 (Rc), Port Size: 02 (Rc, NPT, TSJ, UOJ; 1/4), Made to Order: X8 (Aluminum Case)

The X8 option is a dust-proof and water-jet-proof specification equivalent to IP67.  This spec is achieved with the addition of several unique features above the standard LEY.  The motor is sealed within an aluminum cover, fitted with M-type metal cable connectors.  The rod passes through a scraper and employs a lubrication retainer to prevent oil film washout. 

The X8 option is a dust-proof and water-jet-proof specification equivalent to IP67.  This spec is achieved with the addition of several unique features above the standard LEY.  The motor is sealed within an aluminum cover, fitted with M-type metal cable connectors.  The rod passes through a scraper and employs a lubrication retainer to prevent oil film washout. 

The X8 option is a dust-proof and water-jet-proof specification equivalent to IP67.  This spec is achieved with the addition of several unique features above the standard LEY.  The motor is sealed within an aluminum cover, fitted with M-type metal cable connectors.  The rod passes through a scraper and employs a lubrication retainer to prevent oil film washout. 

The X8 option is a dust-proof and water-jet-proof specification equivalent to IP67.  This spec is achieved with the addition of several unique features above the standard LEY.  The motor is sealed within an aluminum cover, fitted with M-type metal cable connectors.  The rod passes through a scraper and employs a lubrication retainer to prevent oil film washout.