Table of Contents

F N G 4 6 3 NPT Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) 10 Note) Hexagonal nipple (R threads) is included as an accessory for the thread symbol F.

AC

Y YL YT Thread N F Rc(PT) NPT G(PF) Piping adapter port size 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 Attachments for IS1000E Pressure switch applicable model No.

ISO Cylinder

3 3 3 3 D-A9l*1 D-A9lV 7 6 6 6 6 Band mounting D-H7l D-H7lW D-H7BA D-H7NF 3 3 3 4 4 4 4.5 5 D-H7C 8 8 8 9 7 8.5 9 10 D-C7l/C80 D-C73C/C80C 7 7 7 7 7 8 8 8 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2.5 3 3.5 3.5 D-A9l*1 D-A9lV 6.5 5.5 6 D-F7l/J79 D-F7lV/J79C D-F7lW/J79W D-F7lWV D-F79F D-F7BA/F7BAV Rail mounting 5 5 6 5 5 6 4.5 4.5 D-A7l/A80 D-A7lH/A80H D-A73C/A80C 8 8 9 9 7 7 7.5 7.5 D-A79W*2

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Flat with rib Flat type Flat with rib (mm) (mm) Model A ~ B C D IG:M5X O.8 1G:M6xl y ~ H:M6 x l H:M8'x'1 V , I .c F G .C F G Rat F Ot wilt i ib.: Model A > 8 .1 0 E E F E F Flat Flat with rib ZPT40g 40 43 1 ,85 ZPT1O~ 1 0 12 12 17 20 38 25 43 3 1.7 3 25 50.5 4.5 '5 40.5 65 3.3 24.5 , > ~ . :'z;p-rt:Jg ZPTsog 50 53 " 9.5 1 3 . 15, 12 17 .20 38 25 43 3 1.8 3 25 51.5 4$ '?

IIIIIII

F . 4 6 3 l b s . ( 2 1 k o ) P.T. 0 216 in, (5 5mm) or, 0 039 in (1mm) T T 0 256 in (6 smm) .75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57

Mechanical Valves Series NVM, NVFM, NVZNI

F . 4 6 3 l b s . ( 2 1 k o ) P.T. 0 216 in, (5 5mm) or, 0 039 in (1mm) T T 0 256 in (6 smm) .75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57

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(Values at the initial period) Note 3) Available only with T, L, S and C. 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3-position double check (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 450 Base Mounted Plug-in/Plug Lead: Single Unit VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT

VFR

closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

ZP

E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5

Battery-less

3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

0.4

Note 2) : Stations 02 to 24 Note 3) For S/P/F/L kits Replacement Parts No. Part no. Description Material Quantity VVQ1000-80A-1 VVQ1000-80A-2 VVQ1000-80A-3 VVQ1000-80A-4 o !0 !1 !

MY1

Note: 1 Nm = 0.7375 ftlb 1 kg = 2.2046 lb 1 in = 25.4 mm Load (kg) m m m Moment (Nm) F M = F x L M = F x L M = F x L F F L L L 1. Maximum allowable load (1), static moment (2), and dynamic moment (at the time of impact with stopper) (3) must be examined for the selection calculations.

CV/MVGQ

MQQ M RHC 3.

CV/MVGQ

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire None Yes (cable length 0.3m) Nil S N.O. (A contact) N.C. (B contact) N.C. (B contact) Auto switch type N.C. (B contact) None Nil N.C.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.5 (P, R port) L plug connector (L): 10-SYJ3 23-L-M3 (-F) M8 Connector (WO): 10-SYJ3 23-WO-M3 (-F) M plug connector (M): 10-SYJ3 23-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28[35] 12.6 32.5 M8 x 1 15 39.1[46.1] Approx. 300 (Lead wire length) 50.1[52.3] 40.3[42.5] 49.2 41.8 53.1 46.6 35.3 13.5 13.5 13.5 111.5[115.9] 91.9[96.3] 109.7 15 15 22.1 15 22.1 22.1 Refer to page

JIS Standard Hydraulic Cylinder

3 @3 r @5 !

Made to Order

) Cushion valve Top width across flats 3 (Tube cover side only) 3 x 1/4 (Rc, NPT, G) Piping port 3 x 1/4 (Rc, NPT, G) Piping port S + Stroke N 52 30 3 20 14 2 x Speed controller valve Top width across flats 3 45 W 10 45 17 M16 x 1.5 11.5 45 Hs 30 IA IB 40 35 20 Width across flats 17 Shaft: 12d9 0.050 0.093 38 4 x M6 x 12 F R15 Hole: 12H8 +0.027 0 97 78 + Stroke 190 + Stroke (mm) Clevis width