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Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

+ 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F LCD (UP) (SET) ) (DOWN) () LCD 4 (UP) ON/OFF (DOWN) ON/OFF

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

Caution Prepare 2 separate 24 VDC power supplies for the CN1 controller power supply and CN5 input / output signal power supply. 35 - (3) Pulse input internal circuit B7 R1 B8 Pulse input signal switch R2 B9 Main circuit R3 B10 R1 R2 R3 Pulse input signal Power supply voltage Input signal method Current limiting resistor R for pulse input signal

Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.

C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5) U 168 (176

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Component Parts No. q w e r t y No. u i o !0 !

T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42 132 21 54.5 46.5 72 60 60 90 2 150.3 35.5 42 150 21 59 52 81 69 71 Size Port size Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70 1 1/4 68.4

(t) is given by the graph. Then, the charge time (T) for a 100 L tank: With the pressure increase ratio from 2.0 to 3.0, the charge time of 147 58 = 89 sec. (t) is given by the graph. Then, the charge time (T) for a 10 L tank: T = t x = 3.2 x = 32 (s). V 10 T = t x = 89 x = 89 (s).

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

IDX-OM-W029-B / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MLU L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ MM R1 U1 R1 NX A1 A 12 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 Y-03M Y-04M Y-05M Y-08M Y-10M I-03M I-04M I-05M I-08M I-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20