Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

IIIIIII

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

Mechanical Valves Series NVM, NVFM, NVZNI

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C

OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

Table of Contents

8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.

7ND9071en

Housing 15 1 O-ring 16 1 Washer 18 1 Wave spring 19 1 Bushing 36 1 Grounding screw 39 1 Inner cover 42 3 Screw 47 3 Screw 57 1 Conduit entry adapter 61 1 Spool valve cover 63 1 Gasket 100 1 Cover ND92_E1 = H087634, ND92_E2 = H087617, ND9300 = H087628 ND72_E1 = H087634, ND72_E2 = H087617 104 1 O-ring 107 1 Screw 109 1 Pointer 110 1 Stop screw 111 1 Spring 120 1 Prestage unit H039292, also

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

HRL

Water Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 40C

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

energy saving effect

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

53

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

Lightweight and Compact

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

33

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

Series 10-, 21- AW-B Filter Regulator

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1082 A