AR20-B to AR60-B

C SM 3 Valve HNBR AR10P-090S 4 Piston assembly Polyacetal AR10P-150AS 5 Valve guide assembly Polyacetal 131329 A [AR20(K)-B to AR60(K)-B] No. Description Material Part no.

CL

5 !6 !

2 Phase Stepper Motor/Without Motor Brake Series LXS

5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 276 5 Phase Stepper Motor/With Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 10 D-5.1 through Refer to Cross section C-C, bottom view.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Battery-less

5 (37) 56 J 5H9 ( ) depth 5 +0.030 0 6 Connector With lock 24 Motor cable 24 340 65 Lock cable 20 15 65 180 [mm] Model C D F G J K M N LESH25RE-5075 4 80 2 80 143 168 132 LESH25RE-10048 8 44 4 88 207 232 196 LESH25RE-15065 8 66 4 132 285 310 274 Motor cable (2 x 5)5 Lock cable (3.5)5 1 This is the range within which the table can move when it returns to origin.

Air Slide Table

20.7 MXQ16 28 17 5 20 27.2 28.9 M10 x 1 3 MXQ16A 25.2 26.9 MXQ20 31 20 6 27 34.5 37.1 M12 x 1 4 MXQ20A 31.5 34.1 MXQ25 33 21 6 27 41.3 43.8 M14 x 1.5 5 MXQ25A 38.3 40.8 MXQ6B 25 13 3 13 13.6 15.2 M6 x 0.75 2.5 MXQ8B 27 16 4 16.2 14.9 16.7 M8 x 1 2.5 MXQ12B 28 17 5 20 20.2 21.9 M10 x 1 3 MXQ16B 31 20 6 27 25.5 28.1 M12 x 1 4 MXQ20B 33 21 6 27 32.3 34.8 M14 x 1.5 5 Model C F H K L1 L2 M N

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

Stopper Cylinder

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !8 u t @8 #3 @9 $3 $5 $4 #0 $1 $2 $6 Auto switch @6 @4 #1 @3 @5 #6 #5 #7 #8 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 #9 $0 Component Parts Component Parts No. Description Material Note No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

x 1.25 M10 x 1.25 M8 x 1.25 42.5 34.5 30 24 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 188 154 152 144 1/8 88 64 62 62 6 6 5 8 8 8 26-0.033 0 11 8 8 16 13 13 1/4 1/8 1/8 26-0.033 0 32-0.039 0 8 10 M32 x 2 Axial Foot (L): 1011-CM2WL, 2122-CM2WL Standard port Relief port (10-, 21-) Vacuum port (11-, 22-) K H1 AL A H G H2 F 2 x P (Rc, NPT, G) K H + Stroke F G AL A 2 x NN 2

Tie-rod Type Hydraulic Cylinder

size 63 21 32 32 22 6 63 all types 80 65 20 30 16 M18 x 1.5 18.3 4 4 x 28AW M D L 80 26 40 36 27 7 80 all types 100, 125 all types 95 78 22 35 16 M22 x 1.5 22.3 4 4 x 36AW 100 34 45 40 32 8 110 90 26 42 20 M27 x 2 27.5 5 5 x 40AW l 45 160 all types 160 43 50 44 36 10 120 100 30 50 22 M33 x 2 34 5 5 x 50AW 10 K C F B A H 0 0.2 Material: Carbon steel Y-type knuckle d (H8) A B C D G L F E K

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

C76

5 !6 !7 !

C76

5 !6 !7 !

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

New

C 110 VAC J 6 one-touch fitting 1/8 3 D 200 VAC K L 13/64 5 Resin E 230 VAC 5/64 2 M N 8 one-touch fitting 1/8 3 F 24 VDC 13/64 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H 5/32 4 H 100 VAC 1/4 9/32 7 J 110 VAC Aluminum 5/32 4 3/8 K 200 VAC Single 9/32 7 2 Size 2 Unit L 230 VAC 5/32 4 N.C. 8 one-touch fitting J L 9/32 7 M Conduit terminal 24 VDC Resin With surge voltage

SQ1000/2000

(K) (Y) 5 6 5 6 5 6 u 4 For single VQ110LJ2-1 Negative COM: VQ110NJ2-1 5 For double (latching) SQ1C41 SQ1B41 SQ1A41 4 2 4 2 4 2 For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110 (N)J3(B)-1 For 3P, dual 3 port on A side N.C. N.C. N.O. N.O. 1 5 3 1 5 3 N.O.

•

M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

1

NCM Series CG1 Series CQ2 CQS NCA Bore size (mm) With rubber bumper With air cushion Standard type Bore size (mm) G G Th9 Th9 Rod side Head side Rod side Head side D0 0.043 0 0.043 1.5 12 1.5 15 15 20 (2.1) 5 4 3 3 0 0.052 0 0.052 16 1.5 1.5 20 20 25 (2.5) 5 4.5 3.5 3.5 -X 0 0.043 0 0.043 20 2 2 13 13 32 (3.3) 6 5 6 5 0 0.043 0 0.052 0 0.043 25 2 2 15 15 40 (3.9) 7 5 7 5 2032 2 21 50 (4.5