MXQ

5 !6 !7 !8 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5 !6 Component Parts Component Parts No.

XL

Actuation port direction Nil Flange side Left flange surface Rear flange surface Right flange surface K L M Temperature specifications/Heater Symbol Temp. range Heater Nil 5 to 60C (41 to 140F) None None H0 High temp. type 5 to 150C (41 to 302F) With heater for 80C (176F) H1 With heater for 100C (212F) H2 With heater for 120C (248F) H3 High temperature type combination table High temperature

Table of Contents

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

TABLE OF CONTENTS

V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

High Vacuum Angle Valve, XL Series

Actuation port direction Nil Flange side Left flange surface Rear flange surface Right flange surface K L M Temperature specifications/Heater Symbol Temp. range Heater Nil 5 to 60C (41 to 140F) None None H0 High temp. type 5 to 150C (41 to 302F) With heater for 80C (176F) H1 With heater for 100C (212F) H2 With heater for 120C (248F) H3 High temperature type combination table High temperature

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 Y R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 9 7 . 1 ) 5 . 5 4 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 3 0 . 2 ) 5 . 1 5 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 Y R K 2 3 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 8 / 3 S 6 3 1 1 Y R K 4 2 . 1 ) 5 . 1 3 ( 9 0 . 2 ) 3 5 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 Y R K 0 4 . 1 ) 5 . 5 3 ( 9 1 . 2 ) 5 . 5 5

Air Cylinder

9 Non-locking type manual release: Suffix N Locking type manual release: Suffix L CJ1 K !7 !6!5!8 CJP K @3 @6 @2 @9 @7 u q @5 @4 y !9 r t !4!0!1iow !2 @8 @1 @0 CJ2 JCM CM2 CM3 CG1 CG1 Rod end lock CG3 e w JMB MB MB1 CA2 Long stroke CS1 Component Parts CS2 No.

CQ2

Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A L L1 37 3.5 3.5 4.5 5 14 39.5 44 15.5 18.5 22.5 45.5 Double clevis (mm) Bore (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B CD CT N RR CL CU CW CX CZ L L1 51.5 55 63 45.5 49 54 M4 X 0.7 28 5 5 8 10 4 4 5 5 6 6 9 10 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 X 0.7 30.5 15.5

Mechanical Valves Series NVM, NVFM, NVZNI

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

IIIIIII

, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l 1 5 7 440

AC

5 !6 Block packing !

MHZ

MHZA2-6 K MHZAJ2-6 K S C S C -0.013 -0.035 End boss assembly Applicable tube 4 7.8 7.8 8f8 20 4 5 Max. 6.7 33.8 12 10 23.7 Specifications and dimensions other than the above are the same as the basic type or the end boss dimensions of the MHZA type.

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CV/MVGQ

5 !6 !7 !8 !

CV/MVGQ

5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

VZS

KZ: K plug connector With lead wire KZN: K plug connector Without lead wire KZO: K plug connector Without connector 3 position double check 6 How to Order Pilot Valve Assembly How to Order Light Cover Assembly Plug-in type K plug connector Light cover assembly 1 A 5 SCZS2 2 A 1 L AXT171-2 FZ Pilot valve assembly Series VZS2000 VZS2000 Light cover assembly Coil rated voltage Pilot valve manual

7

K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102 71 50

&snac

I D G 5 H ( M , V I D G 3 H ( M , V [ O e S l t " t , t 4 1 D G 3 ( M , V M O d E I 0 . B 5 M P E M a x . v o r k i n s P l J t 9 , 0 . 3 M P E C l , t i n , v o f k i n g p r e s s Cornpr essqd--q-!-I wElTTns f lu i 5 * 5 5 " C ( N o t f r o z e n ) A m b i e n t a n v o r k i n g f l u i d t o[TLeT-ilfTeh/ Polnt ; C, 5 6 ( s ?