CXS

7 Piston rod A Piston seal Hard chromium electroplated Carbon steel NBR e !8 Piston rod B Rod seal Aluminum bearing alloy NBR r !

Cylinder with Lock Series CNS

Seal kits are sets consisting of items 46, 48, 49, 53, 54 and 57, which can be ordered using the seal kit for each cylinder bore size. 4 Series CNS Dimensions Basic type/CNSB 2-MA Effective thread depth R Rc(PT) BQ Plug with breathing hole CL M GA BC element T G G FA GB Rc(PT) BP Unlocking port 2-Rc(PT) P GL GR Width across flats KA Cylinder port MM Q D EA E V AL A K F VA BN C B N N 4-J

F

D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

0.4

q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3

High Vacuum Angle Valve

r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

MVGQ

R port P/E port Electrical entry Option With wire Without connector With wire Without connector With connector Without connector L LO M MO D DO Grommet (Lead wire length: 300 mm) L plug connector G Grommet (Lead wire length: 600 mm) M plug connector H E T D Grommet terminal Conduit terminal DIN terminal DIN termminal 10-16-14 15 Valve Mounted Guide Cylinder Series MVGQ Specifications JIS

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Smooth Cylinder/Low Speed Cylinder

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA Both Ends Tapped (mm) O1 thread Bore size (mm) R R O1 R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 2 x P (Rc,NPT,G) (Port size) H thread effective depth C Auto switch Lead wire min. bending radius 10 4 x N through 8 x O counterbore F Q D Z M E J W E M K L B + Stroke A + Stroke Rod end male thread Width across flats

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

ITV

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

Cylinder with Lock

D E D B B1 C BH1 H K A BN N1 F AL H1 MM H1 ZZ + (2 x Stroke) S + Stroke H + Stroke A K AL MB B B1 C B C F N MA With rod boot e e * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 When used as an IO-Link device Brown L+ L+ Main circuit Black C/Q C/Q IO-Link master White Other Blue L L 17 2-Color Display Digital Flow Switch PF2M7(-L) Series Construction: Parts in Contact with Fluid PF2M701/702/705/710/725/750/711(-L) e w w q e r t y u i o r Female thread w PF2M705/710/725/750-C4/C6(-L) PF2M711

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Note No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Intrinsically Safe Valve

(R)-LL-02 L (Lead wire length) 104 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 34.5 37.2 Terminal type (TT) 53-SY5140(R)-TT-02 Max. 10 L (Lead wire length) 120.8 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 23 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 19 18 9.5 2 A B C 53-SY5 40(R)-L-02 37.2