SMC Corporation of America
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q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160

R K05 Omron D2VW-5, 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4".

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

-H -R -W N L Bore size Stroke Axial foot: CBM2L CL MLGC -H -R -W N L -H -R -W Front flange: CBM2F Bore size Stroke Rear flange: CBM2G Bore size Stroke N L CNA CB CV/MVG CXW -H -R -W N L Bore size Stroke CXS Single clevis: CBM2C CXT MX MXU MXS -H -R -W N L Bore size Stroke Double clevis: CBM2D MXQ MXF MXW MXP MG Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front

o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve

l-en load,o f * t__i-r i l u i I I I l ; l 5 t 6 t i ] F ? {C $mies L)(P tleslric Actrfllor$ It|odd $slediru ltleiludl Operating conditions when LXP is used as lifter Working fange to linear bail bearing. Use within allowable thrust. Lateral load allowance zoo T---*J-rf I I T---r -tl l r ) = _ 1 ) , 4 \ t l 1 -;-) 50 to 100 stroke 75 | 2.47 1oo I zJt 125 1 5 0 ' , , e 1'rC ' "; ?

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Pressure gauge unit 2) e 2P 3P 4PL r t Sample Order Number Port Unit psig/bar MPa Code qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) AK1202S e q 8 8 8 8 w 8 8 8 8 r r No code MPA q w 2P 3P 4PL 5PC MPA MPA MPA V3 V3 V3 2) Pressure gauge unit MPa or psig/bar selectable.

100 30 150 30 50 125 125 150 MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 5.9 4.5 5.6 17.6 3.6 5.6 23.6 3.6 15.6 5.6 3.6 21.6 7.6 5 10.9 14.9 47.9 8.9 45.9 5.9 22.9 3.9 12.9 6.9 4.9 20.9 A E 11.6 6 28.4 10.4 41.4 70.4 26.4 39.4 68.4 18.4 20.4 16.4 8.4 8.4 6.4 18.4 16.3 7 28.7 8.7 38.7 61.7 86.7 26.7 36.7 59.7 84.7 18.7 13.7 16.7 6.7 8.7 6.7 11.7 18.9 8 32.6 12.6 31.6 59.6 88.6 115.6 30.6 29.6 57.6

Applicable solenoid valve: Type 10-SYJ314M Type 10-SYJ324M Plug (SYJ3000-33-1) Plug (SYJ3000-33-1) Seal the unused "R" port on the end cover side of the manifold. Seal the unused "R" port on the end cover side of the manifold. e 10-SS5YJ3-41/-S41 The 3 port valve can be used by simply sealing off the unused "R" port with rubber plug (SYJ3000-33-1).

(b) 1) Vb[V] 2) (Ib) Ib = Vb R [A] 3) (E) L lb2 E = 2 [J] 4) (Vi) (Ib)(Vi)(E) (Vi)[V](Vs)[V]Vi ViVs 5) () () = E Vi lb [S] 6) ()N (Ip) (Ip)(Ib) Ip/IbN[] (4) 13 3 13. 13.1.2 ( ) () LE--B S5 S6 S7 S8 50W 100W 200W 400W (1) () (4) DC 24 V 0 -10% [W] at 20 6.3 7.9 (6) [] 91.0 73.0 (6) [H] 0.15 0.18 [N m] 0.32 1.3 (2) [s] 0.03 0.03 (2) [s] 0.01 0.02 1 [J] 5.6 22 [J] 56 220 (5