High Vacuum Angle Valve

Symbol Model Remarks M9NJL D-M9NJL Lead wire length 3000 mm M9NJZ D-M9NJZ Lead wire length 5000 mm M9PJL D-M9PJL Lead wire length 3000 mm M9PJZ D-M9PJZ Lead wire length 5000 mm M9J/ Without auto switch (with magnet) y Number of auto switches/Mounting position Symbol Quantity Mounting position A 2 Valve open/closed B 1 Valve open C 1 Valve closed * For details about auto switches, refer to

MY2

Standard Strokes Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100,200,300,400,500,600,700,800,900 1000,1200,1400,1600,1800,2000 3000 25, 40 5000 Strokes are manufacturable in 1mm increments, up to the maximum stroke. When exceeding a 2000mm stroke, specify "-XB11" at the end of the model number. Refer to the Made to Order Specifications on page 33.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1960 1400 841 IN 6 2 6 6 6 6 19 45 2 45 63 Thread 2180 1560 935 OUT 6 3 12 26 27 53 53 120 1.5 175 Rod end male thread Nut 3170 2270 1360 IN 4 2 8 17 17 32 32 49 1 116 80 With boss in head side 3520 2510 1510 OUT 2 1.3 3 5 7 13 25 45 0.7 96 With rubber bumper 5000

Digital Gap Checker

ZS-31-C (Cable with connector) 23.5 5000 Pin no. Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no.

Ionizer

L 1000 mm 2000 mm 3000 mm 4000 mm 5000 mm 7000 mm 10 mm IZS31-CF01-X210 IZS31-CF02-X210 IZS31-CF03-X210 IZS31-CF04-X210 IZS31-CF05-X210 IZS31-CF07-X210 IZS31-CF10-X210 Connection cable from the right-hand side of the control unit Frequency selection switch 12P modular jack (Plug for power cable) 190 36 16 30 Order connection cables separately.

KT10

6000 psig (41.4 MPa) inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500 24.1 1/4-20 UNC Screw For Panel Mounting Delivery pressure (MPa) Delivery pressure (psig) 20.7 3000 Max. 0.25 (6.4) Panel Thickness 17.2 2500 2000 13.8 To 6.88 (174.7) 1500 10.3 1000 6.9 500 3.4 0.75 (19.1) 0.50 (12.7) 3.84 (97.5) Min. 1.50 (38.1) 0 0.0 0 1000 2000 3000 4000 5000

AR20-B to AR60-B

0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR50(K)-B Rc1 AR60(K)-B Rc1 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 5000 10 0 0 0 5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) 68 Series AR10-A Series AR20-B to AR60-B Series AR20K-B to AR60K-B Pressure Characteristics (Representative

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

MPa 1.0 MPa ALIP Operating pressure differential range (Difference between tank pressure and line pressure) (Note 1) 0.1 to 0.6 MPa AEP HEP Vibration resistance (Pressure differential 0.3 MPa) 1 G (9.81 m/sec2) or less 120 : 65 : 100 : 120 190 220 1800 4 1 (Note 2) 4 1 Min. operating flow (L/min (ANR)) 8 3 1 : 460 1 : 650 2 1 2 1 (Note 3) Bowl capacity (cm 3) (Capacity between levels) 5000

Series AP500

0.007 to 0.2 MPa) AP1010 2 to 100 psig (0.014 to 0.7 MPa) Select compatible materials of construction for the gas AP1006 2 to 60 psig (0.014 to 0.4 MPa) AP1015 5 to 150 psig (0.034 to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000

AR20-B to AR60-B

0 1000 2000 3000 500 1000 1500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AR50(K)-B Rc1 AR60(K)-B Rc1 0.6 0.6 0.5 0.5 Outlet pressure [MPa] Outlet pressure [MPa] 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 5000 10 0 0 0 5000 10 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 70 AR10-A Series AR20-B to AR60-B Series AR20K-B to AR60K-B Series Pressure Characteristics (Representative

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 526 Series AS Speed Controller: Standard Type In-line Type Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves. 

Electric Slide Table / High Precision Type 《 AC servo motor 》

LESYH25R/LS3 LESYH25DS3 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N] (Set value: 15 to 30%) *1 65 to 131 127 to 255 79 to 157 154 to 308 98 to 197 192 to 385 Max. speed[mm/s] 400 200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves. 

CY1

holding force 20 20mm Refer to the magnet holding force table below. 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Standard Stroke Table Bore size (mm) Standard stroke (mm) Maximum Note) available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.