MK

27 27 B 5 7.5 10.5 13.5 A 35.5 26.5 31 31 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 CY MK20 MK25 MK32 MK40 MK50 MK63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Magnetic body (Steel plate, etc.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 121.7 117.7 33.3 117.7 29.3 33.3 3 10.5 4.5 197.5 193.5 46.5 193.5 42.5 46.5 4 15 6.3 CX 266.5 262.5 57.5 262.5 53.5 57.5 4.5 14 6.6 DMY3B D-A9, D-A9V (mm) D-F9W, D-F9(W)V (mm) D-M9, D-M9V (mm) -X A B Operating range Bore size 16 25 40 63 A B Operating range Bore size 16 25 40 63 B Operating range

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

KR

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

CJ5-S

MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Double Knuckle Joint Mounting Nut Rod End Nut RHC Knuckle pin and snap ring are packaged together. d d MM ND hole H10 Shaft d9 L MK(2) R1 RS Q G C C + 0.2 0 U1 + 0.2 0 NX A1 L1 RS H A 12 7 B H B H RZQ Material

RLQ

Retraction locking: B Extension locking: F CL W CL1 B A MLGC Emergency stop Drop prevention A W B CNG W MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA W CNS W CLS CLQ MLGP W RLQ W MLU ML1C W DPreparing for Operation Warning 1.

MXW

220.5 MX A 51 31 31 31 31 MTS B 104 124 149 174 199 MXW12 W 31 11 11 11 11 MY V 124 144 169 194 219 A 59.5 34.5 34.5 34.5 34.5 34.5 W V CY B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 W 39.5 14.5 14.5 14.5 14.5 14.5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

Round Type Hydraulic Cylinder

11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

PF2A/PF2W

Panel adapter B ZS-22-02 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Specifications ZSP PF2W300/301 PF2W330/331 Model 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min ISA2 Flow rate measurement range Note 1) 0.35 to 4.5 l/min 1.7

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

CRQ2

(800) 258-9200-www.stevenengineering.com CRA1 With double shaft DD W D CRQ2 I K Auto switch MSQ b (10) Max. 2Rc 1/8 (Port size) H F MRQ (US) (UW) DCB Q BC 20M N BB BA BA G D A (AU)Max S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) Rotating angle A AU B BA BB Size BE J JA JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

C D Side support B MY-SB 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61

Thermo-con/Rack Mount Type

Revision History Cooling capacities of 800 W and 1 kW have been added. Number of pages has been increased from 16 to 20. TT Edition B Cooling capacities of 400 W and 510 W have been added. Number of pages has been increased from 20 to 24. UO Edition C The water-cooled type (800 W, 1.2 kW) has been added. Number of pages has been increased from 24 to 28.

RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

REA/REB

Order Made Auto Switches Strokes Bore size REAH10 RE H15 REAH20 RE H25 RE HT25 RE HT32 150 850 900 1000 950 275 325 225 375 400 175 200 250 300 350 500 425 475 450 525 550 575 600 650 700 750 800 A B A B A B A B : Standard strokes : Strokes available with -XB10 : Not available 91 Series REA/REB Safety Instructions These safety instructions are intended to prevent a hazardous situation and

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Proper Auto Switch Mounting Position (Detection at stroke end) C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Series MY2C Series MY2H Series MY2HT (mm) D-M9, D-M9V (mm) D-M9, D-M9V (mm) D-M9, D-M9V A A A B B B Bore size 16 25 40 Operating range Bore size

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY on ti rp so on ad a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.