Hand Valve Series VH

92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R)

Process Pump

14 Foot (Option) FLUID IN Rc, NPT, G 3/8" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) 63 74 Tube extension: PAF3410P13 P13N P13F 139 152 2 x M5 x 0.8 Thread depth 9 Reset button 139 114 95 19 4 x 7 mounting hole (Option is selected) Bottom view of body Air operated reset port Rc, NPT, G 1/8" 16 (9.50) (12.7) FLUID OUT 1/2" tube extension AIR SUP Rc, NPT, G1/4" (102) 119 106 14 13 97

0.4

A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 65.5 76 86.5 97

CQ2

across flats K 11 Lead wire minimum bending radius 10 D D 22 Z M E Auto switch K M L B L+ stroke D-A7, A8 E J S A+stroke Rod end male thread Rod end male thread (mm) A Without auto switch A With auto switch Rod end nut Rod end nut 2-H1 Bore (mm) 50st. or less 55 to 75 80 to 100 50st. or less 55 to 75 80 to 100 87.5+ stroke 97.5+ stroke 32 172.5 197.5 172.5 197.5 C1 C1 Auto switch D-A9, F9 97

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details about the rod end nut and accessory brackets, refer to page 7-6-20. 31.5 35 41 47.5 57.5 67.5 55.5 62 77 90 114 134.5 9 depth 7 9 depth 7 11 depth 8 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 16 16 20 20 25 30 60 69 86 103 132 156 14 14 17 17 22 27 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 7-6-97 98 Compact Cylinder:

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73 16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 10-SYJ714M 140 (80) 1/8 Base mounted (with sub-plate) 10-SYJ724M 135 (75) 136 (76) 157 (97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate. 627 3 Port Pilot Solenoid Valve 10-SYJ700 Note) AC-type models that are CE-compliant have DIN terminals only.

10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

CXS

with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 194.5 Z section 31.5 110 3.3 69 113 105 A section 5.8 1.7 4.8 Stroke + 430 170 8-9 A section detail (Switch groove) 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

Single Axis Electric Actuator Series LJ1H

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 31.5 194.5 Z section 110 3.3 69 113 105 A section 5.8 1.7 Stroke + 430 170 4.8 A section detail (Switch groove) 8-9 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

High Vacuum Angle Valve, XL Series

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 34 49 57 57 59 60 61 62 62 71 85 90 91 92 92 94 95 97 101 104 106 108 116 122 122 124 125 126 127 127 127 128 132 138 138 140 141 141 Vacuum Pressure Switch/Solid State Switch \(ZSE\), Diaphragm Switch \(ZSM\) .

Series VQ Base Mounted Metal Seal/Rubber Seal

. < >: AC type and TV approved type Dimensions (mm) L n Equation L1=10.5n+44.5, L2=10.5n+62.5 n: Station (Max. 24) 2 65.5 83.5 112.5 123 3 76 94 125 135.5 4 86.5 104.5 125 135.5 5 97 115 137.5 148 6 107.5 125.5 150 160.5 7 118 136 162.5 173 8 128.5 146.5 175 185.5 9 139 157 187.5 198 10 149.5 167.5 187.5 198 11 160 178 200 210.5 12 170.5 188.5 212.5 223 13 181 199 225 235.5 14 191.5 209.5

XL

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

D-F6N/D-F6P/D-F6B

[For D-97, (+) is on the no-displayed side, () is on the black line side.] 1) If connections are reversed, an auto switch will operate, however, the light emitting diode will not light up. Also, take note that a current greater than that specified will damage a light emitting diode and it will no longer operate.

7

The dog fitting cannot be attached to the knuckle joint, M6 without tap (end bracket symbol I or Y). 30 97 42.5 Foot MK 49 Material: Rolled steel Part no. Applicable clamp cylinder Option symbol 40 CK-L04 CK1A series CK1B series MK2T L Foot Note 1) A mounting bolt (hexagon socket head cap screw) and a spring washer will be attached as a standard for the foot bracket.