10

Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15

CXS

with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 194.5 Z section 31.5 110 3.3 69 113 105 A section 5.8 1.7 4.8 Stroke + 430 170 8-9 A section detail (Switch groove) 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

Single Axis Electric Actuator Series LJ1H

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 31.5 194.5 Z section 110 3.3 69 113 105 A section 5.8 1.7 Stroke + 430 170 4.8 A section detail (Switch groove) 8-9 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

High Vacuum Angle Valve, XL Series

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 34 49 57 57 59 60 61 62 62 71 85 90 91 92 92 94 95 97 101 104 106 108 116 122 122 124 125 126 127 127 127 128 132 138 138 140 141 141 Vacuum Pressure Switch/Solid State Switch \(ZSE\), Diaphragm Switch \(ZSM\) .

Series VQ Base Mounted Metal Seal/Rubber Seal

. < >: AC type and TV approved type Dimensions (mm) L n Equation L1=10.5n+44.5, L2=10.5n+62.5 n: Station (Max. 24) 2 65.5 83.5 112.5 123 3 76 94 125 135.5 4 86.5 104.5 125 135.5 5 97 115 137.5 148 6 107.5 125.5 150 160.5 7 118 136 162.5 173 8 128.5 146.5 175 185.5 9 139 157 187.5 198 10 149.5 167.5 187.5 198 11 160 178 200 210.5 12 170.5 188.5 212.5 223 13 181 199 225 235.5 14 191.5 209.5

XL

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

D-F6N/D-F6P/D-F6B

[For D-97, (+) is on the no-displayed side, () is on the black line side.] 1) If connections are reversed, an auto switch will operate, however, the light emitting diode will not light up. Also, take note that a current greater than that specified will damage a light emitting diode and it will no longer operate.

7

The dog fitting cannot be attached to the knuckle joint, M6 without tap (end bracket symbol I or Y). 30 97 42.5 Foot MK 49 Material: Rolled steel Part no. Applicable clamp cylinder Option symbol 40 CK-L04 CK1A series CK1B series MK2T L Foot Note 1) A mounting bolt (hexagon socket head cap screw) and a spring washer will be attached as a standard for the foot bracket.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97

CV/MVGQ

110 135 160 25 37.5 50 75 100 12.5 185 125 17 72 32 36 85 97 110 135 160 25 37.5 50 75 100 190 12.5 125 41 46 19 77 90 102 115 140 165 25 37.5 50 75 100 Long stroke type includes ones for strokes more than 301 mm. 10-15-21 22 Series CVM5 Axial Foot Style (L) Bore size Stroke CVM5L Manual override Width across flats B1 Width across flats B2 Width across flats NA Mounting hole S + Stroke

ZP

M6 x 1 I: M8 x 1 Y U C U C U C U C U C ZPR20 20 ZPR40 40 23 14 28 25 15 43 18.5 32 42.8 60.6 25 86.5 15 76.5 6.5 3.3 1.7 29 39.8 57.6 83.5 73.5 4 ZPR50 ZPR25 25 50 53 19.5 33 43.8 61.6 87.5 77.5 7.5 3.8 1.8 ZPR32 29.5 32 35 14.5 40.3 58.1 84 74 4.5 2.3 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97

IDG

.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 IDG10/10H IDG20/20H Values inside [ ] are for NPT threads. 83 187 53 165 62 113 212 54 190 82 1/4, 3/8 14-19-30 27 Series IDG Membrane Air Dryer Single Unit Type IDG30/50

CV/MVGQ

110 135 160 25 37.5 50 75 100 72 12.5 17 185 125 32 85 97 110 135 160 25 37.5 50 75 100 36 77 12.5 19 190 125 41 46 90 102 115 140 165 25 37.5 50 75 100 Long stroke type includes ones for strokes more than 301 mm. 10-15-21 22 Series CVM5 Axial Foot Style (L) Bore size Stroke CVM5L Manual override Width across flats B1 Width across flats B2 Width across flats NA Mounting hole S + Stroke

REA/REB

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-P S + Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W A N 8 Z + Stroke Square nut for body mounting J TW (mm) HP MM HT J LW LL L M HG HC HB HA H EB EA Model A REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97

Free Mount Cylinder

Model 40 50 60 70 80 90 100 49 (59) 55 (65) 61 (71) C(D)UK6-D Symbol Specifications -XB9 Low speed (10 to 50 mm/s) 71 (81) 79 (89) 87 (97) C(D)UK10-D -XB13 Low speed (5 to 50 mm/s) -XC19 Intermediate stroke (with a spacer built-in) 102 (132) 114 (144) 126 (156) C(D)UK16-D 243 (284) 267 (308) 291 (332) 315 (356) 339 (380) C(D)UK20-D 405 (460) 440 (495) 475 (530) 510 (565) 545 (600) C(D)

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.