Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: Rc, Port Size: 04 (1/2), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order:

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order:

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order:

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order:

Electric Actuators

X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 123 91.5 X22 200

Table of Contents

Symbol Signal description Signal description Driver model MR-C10A MR-C20A MR-C10A1 MR-C20A1 Symbol Digital output power supply Failure Positioning complete Z phase pulse 1 2 3 4 5 7 8 9 10 11 12 13 14 15 16 17 19 20 V+ ALM PF OP SG NP NG PP PG Shield SD SG CR LSN LSP V5 SON OPC V24 Interface power supply common Clear Reverse stroke end Normal stroke end Interface power supply Servo ON Open

LJ1H

MR-C10A Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ013 100 200/230 R 100/115 MR-C10A1 With brake (Vertical specification) HC-PQ13B 100 200/230 MR-C10A 100/115 SGDE-01BP SGME-01BF12 Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 100 200/230 SGDE-01AP SGDE-01BP SGDE-01AP SGME-01AF12 SGME-01BF12B

AC Servo Motor Driver (SSCNET /H Type)

the MR Configurator2TM instruction manual (Manual/ib0300160*.pdf) contained on the setup software (MR Configurator2TM) CD-ROM.

AC Servo Motor Driver (SSCNET Type)

MR Configurator2TM instruction manual (Manual/ib0300160*.pdf) contained on the setup software (MR Configurator2TM) CD-ROM.