EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

C95Series

C95 I'S\8J1s1ard parrnu';' .1-XB13 ~owspeed Specifications . Action Double actin si Ie rod o &ratin Istan d 0.2-2 irv'sec 5~50mm/s&C 1 SpeCIfications and dimensions 8)Ccept (!lOre mentioned above 8'8 1 00 same as standard port locatIon C95 Standard part number l-xC3 j B f@] Location 01 pons and cushion val\les On rod cover and head CO\lfH.

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I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

REC

34.5 M26 x 1.5 Up to 700 1/8 146 9 10 40 60 40 204 20 40 42.5 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 40 217 22 MI W S 40 53 51 M32 x 2 Up to 1000 1/4 181 10 11 53 77 44.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Title not found

3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style auto drain AFD4000

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

REA/REB

Speed 600 mm/s D 20, 25, 32, 40 Attached from top with cap bolt Floating block L LA A Attached from bottom with cap bolt XB WF 2-SS (helical insert thread) Body FG XA LF Bolt size: MD R Note 2) S HL FF Note 1) HB Note 1) High Precision Guide Type REBH Switch rail FC D' Section D-D' (mm) FF Note 1) FE Note 1) FC BA BB CC A Bore size FH HB Note 1) SS FG MD R Note 2) LF XB HL L LA S WF XA 10

REA/REB

from cylinder shaft center Lo (cm) RZQ 25 15 40 500 500 MI W S 300 300 200 200 CEP1 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3

REA/REB

Compared with the previous type (Series REA: 300 mm/s), the tact time can be shortened by approximately 1/2.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1) [EX123D-SUH1] Note 2) EX120-SSL1(-XP) Note 1) [EX123D-SSL1] Note 2) EX120-SSL2(-XP) Note 1) [EX123D-SSL2] Note 2) q EX120-SDN1 [EX124D-SDN1] Note 2) EX120-SCS1(-XP) Note 1) [EX124D-SCS1] Note 2) EX120-SCS2(-XP) Note 1) [EX124D-SCS2] Note 2) EX120-SMJ1(-XP) Note 1) [EX124D-SMJ1] Note 2) EX120-SCM1 EX120-SCM3 AXT100-1-P Note 3) U S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1) [EX123D-SUH1] Note 2) EX120-SSL1(-XP) Note 1) [EX123D-SSL1] Note 2) EX120-SSL2(-XP) Note 1) [EX123D-SSL2] Note 2) q EX120-SDN1 [EX124D-SDN1] Note 2) EX120-SCS1(-XP) Note 1) [EX124D-SCS1] Note 2) EX120-SCS2(-XP) Note 1) [EX124D-SCS2] Note 2) EX120-SMJ1(-XP) Note 1) [EX124D-SMJ1] Note 2) EX120-SCM1 EX120-SCM3 AXT100-1-P Note 3) U S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-

ZP

P. 82 P. 83 ZPB-X3 (J/JB/JF)01 68 Vacuum Equipment Precautions 1 Be sure to read this before handling.

Shock Absorbers and Rate Controls

*s*rfu'*rs Non-Adjustable Hydraulic Series @$rc^ PM Series Sizing Gurves lmperial ro gf; N : " , d \ E o 9 N Fl E i ' o < n ToTAL ENEFGY (inbs) r 2 0 PA a t o g . o N 7 t O S o o t { q E ! o o o . I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

VZ100/300/500

Plate Assembly Manifold gasket DXT170-25-1A Manifold gasket Round head combination screw (With spring washer) Applicable base VV3Z1-01-1 VV4Z1-20-1 Blanking plate Manifold base Applicable base VV3Z1-01-1 VV4Z1-20-1 Manifold gasket Manifold base Mounting Screw Tightening Torques Caution Applicable base VV3Z1-01-1 VV4Z1-20-1 M2.5: 0.45 Nm Warning Manifold base When mounting a solenoid valve

VQZ1000/2000/3000

> 2 position 3 position/exhaust center Option VQ2000-FPG 01 01 F 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) None Nil DIN rail mounting style (For manifold) IN side port size OUT side port size D 01 02 C6 C8 One-touch fitting for 6 One-touch fitting for 8 Rc 1/8 Rc 1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 Rc 1/8 Rc 1/4 F With bracket

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114.5 5 1.8 ;t M~e'l 'Iii 1'B e . , G U4(~1~) 13.5 5 1.8 D I' F f .F ,Holl, (s. ) \16 Ii" 15.5 7 <.~ 48 , 5 6 8 10 ~"" ) .. ~ : 1~.p ' 7 2$ 30 ZPY25D 25 28 20 ... fl tS12 a~ ~ .