For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

VZ3000

VFR Thread type 1 3 5 F Z Plug-in VZ3 4 VP4 Note) VZS 1 0 5 L Non plug-in VZ3 4 VFS Type of actuation Thread type VS4 2 position single Nil Rc F N T G NPT VQ7 1 Body option NPTF EVS 0: Individual exhaust for the pilot valve Port size 2 position double 1 8 Nil: Without sub-plate 01: Rc With sub-plate VFN 2 3(R) port PE port 3: Common exhaust type for main and pilot valve 3 position closed

Vacuum Regulator

(A) P601020-14 Fitting type Fitting size Nil L1 Straight Elbow Symbol C6 C8 C10 N7 N9 N11 Size 6 8 10 1/4" 5/16" 3/8" Included Parts No. 1 2 3 Description Bottom bracket Square nut x 4 Phillips screw x 4 Note) No. 1 to 3 are shipped together.

ZSE40/ISE40

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

Table of Contents

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Speed regulation range (s/90) CRB1 0.082 J 0.12 J 0.398 J 0.6 J 0.112 J 0.16 J 0.54 J 0.811 J Allowable kinetic energy 245 N 390 N 490 N 588 N 245 N 390 N 490 N 588 N Allowable radial load Shaft load MSU 196 N 340 N 490 N 539 N 196 N 340 N 490 N 539 N Allowable thrust load Bearing Bearing CRJ Side ported or Axial ported Port location Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

VK300

-42Stations -C4, C6 (Pitch) 2 x 4.5 Manual override (Non-locking) (Mounting hole) 300 (Lead wire length) 4 x Rc 1/8 (P, R port) (Station n) (Station 1) 300 (Lead wire length) 2 x 4.5 VV061 Max.5.5 (Pitch) (Mounting hole) Manual override (Non-locking) VV100 V100 (Station 1) (Station n) S070 (Pitch) n x Rc 1/8 (A port) VQD VQD-V (Pitch) n x One-touch fitting C4: Applicable tubing T0425 C6:

VQ7-6/7-8

(B), 4 (A) Applicable solenoid valve Manifold block size Weight kg Stations 1 (P), 3 (R2) 5 (R1) port size Piping direction Size Rc1/4 Rc3/8 C6 (for 6) C8 (for 8) C10 (for 10) Note) Right, Left Rc1/4 Rc3/8 C12 (for 12) ISO size 1 VQ7-6 ISO size 1 series 0.43n + 0.49 (n: Stations) 10 stations max.

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

Title not found

(800) 526-7661 1/4 NPT Male Thread to Tube 1/4 Male Pipe Thread to Tube not shown not shown 9 16 Hex Typ. 31/32 31/32 3 4 Typ. 1-3/32 1-1/8 1-1/4 9 32 1 1-1/16 44 1/4 B2 1/2 1/4 B2 1/4 B4 1/4 B6 1/4 B3 1/4 B1 1/4 B5 1/4 B8 1/4 B3 1/2 1/4 Male Pipe Straight Manifolds Top View Top View #1 Barb P/N 1/4 B1 x 2 1/4 B1 x 3 1/4 B1 x 4 1/4 B1 x 5 1/4 B1 x 6 1/4 B1 x 7 #2 Barb P/N 1/4

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000 [Option] How to Order Manifold SS5Q SB 3 1 08 D CE compliant Manifold series Nil Q CE compliant 1 SQ1000 SI unit output polarity 1(P), 3(R) port size Nil N Positive common Negative common 1(P), 3(R) port, One-touch fittings for 8 Nil 1(P), 3(R) port, One-touch fittings for 5/16" 00T Valve stations Symbol 1 station Note

4/5 Port Air Operated Valve Series SYJA3000 1

type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 3 position

4/5 Port Air Operated Valve SYJA3000 Series

VGA Port size Symbol Body ported Thread type VPA Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 2 position single 2 position double 1/8 With sub-plate 01 F N T VPA3 2(B) (A)4 2(B) (A)4 3 position closed center 3 position exhaust center (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

C6 (6 Onetouch fitting) C8 (8 Onetouch fitting) Rc(PT)1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) Port size A, B port Rc(PT)1/8 Rc(PT)1/8: 11 (0.6) C6: 8.6 (0.48) C8: 9.9 (0.55) Body ported SYJ7l2l __ __ __ (1) Valve effective area mm2(Cv) Base mounted SYJ7l4l __ 11.9 (0.66) 9.5 (0.53) C6: 8.5 (0.47) C8: 9.7 (0.54) __ Note 1) Value for a single solenoid 2 position valve mounted

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

(The part numbers are for 1 piece.) !0 ZHP ZHP o ZU i VQD-V Replacement Parts/How to Order o!0 Plate assembly i Pad ZHP1 PL A 1 N ZP3E 80 BM Holder Pad material N NBR S Silicone rubber U Urethane rubber F FKM Size (Applicable pad dia./form) 1 63/80: Flat type, 63: Bellows type 2 80: Bellows type Plate Part number for a set of plate and holder Pad form !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to