SMC Corporation of America
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Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 ZS-31-B() ZS-31-C() -35No.PS-OMR0001CN-J 3 ISA-19-() 4 1 3 2 ISA-19-2/3(5 ) ISA-19-4/5/6(8 ) M12 -36No.PS-OMR0001CN-J 3 () ISA3-N DC+ OUT1 N.C.

Option Part no. 1 Bracket A ZS-24-A With 2 pcs. of mounting screws 1 Bracket D ZS-24-D With 2 pcs. of mounting screws 1 Panel mount ZS-24-E 1 ZS-24-F Panel mount + Front protection cover 16-2-28 5 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Specifications ZSE50F (Compound pressure) 100 to 100 kPa 100 to 100 kPa 500 kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

NPT1/4 F02 G1/4 2 A A B B :ISO1179-1 IO-Link/1+2 NPNorPNP 1 M12 5m M12 5m L2 S L 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-31-B 5 m M12 ZS-31-C 5 m -8No.PS-OMV0003CN-G M12 4 24 OUT1 IO-Link OUT2 UP DOWN SET () ()() (() UP ON/OFF DOWN ON/OFF SET IO-Link OUT1 (SIO ) -9No.PS-OMV0003CN-G IO-Link IO-Link 1 Operate () Start up Preoperate IO-Link 2 IO-Link 1 SIO

0.4MPapsi 0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

Wire core size AWG24-26 (0.14 to 0.2mm) AWG24-26 (0.14 to 0.2mm) AWG20-22 (0.3 to 0.5mm) AWG20-22 (0.3 to 0.5mm) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 1.4 to 2.0 PSE521 1.0 to 1.4 PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. Brown Black Blue N.C. 1 2 3 4 F.G.

Note Panel mount adapter ZS-26-B With waterproof seal, mounting screw Front protective cover + Panel mount adapter ZS-26-C With waterproof seal, mounting screw Front protective cover only ZS-26-01 Separately order panel mount adapter, etc. Power supply/output connection lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-C-5 1 pc.

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

Connector CL Note Description Part no. 4 3 2 1 Connector 4 pcs. per set ZS-26-E Sensor cable Cable length: 3m ZS-26-F Note) At the factory, the connector is not connected to the cable, but packed together with it for shipment. Cable length: 3m Connector + Sensor cable ZS-26-G The connector is not connected to the cable at the time of shipment.

NO OFF n-2 n-1 Real-time flow rate Flow rate conversion Normal condition: 0C, 101.3 kPa, dry air Standard condition: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these conditions.

()ZS-37-A (L )ZS-37-B ZS-29-T -39No.PF-OMO0007CN NPN(1 ) + (15 V) NPN(1 ) + (420 mA) PNP(1 ) + (15 V) PNP(1 ) + (420 mA) 10 PF2A7 NPN(1) + (15 V) PF2A7--28--X560 PNP(1) + (15 V) PF2A7--68--X560 NPN(1) + (420 mA) PF2A7--29--X560 PNP(1) + (420 mA) PF2A7--69--X560 DC(+) DC(+) OUT1 OUT1 DC1224V DC1224V DC(-) DC(-) Max.80 mA 1.5 V 6815 V 1 k 69420 mA 12 V300 24 V600 Max.30 V80 mA

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1