Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, DD, ZH NOZZLE SIZE 1.3, .11660 lb

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Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

ZX

PS PV PD EXH PS PV 1(PV)(PS PD) M-3P PD Plug PE P3200152-12 (M2.5 x 28) PS Manifold base PV Philips screw Plug M-5P Table (1) Single unit In the case of manifold Quantity 2 1 1 1 1 Part no.

ZP

(mm) Model Flat (U) Flat with ribs (C) Deep (D) Bellows (B) Thin flat (UT) Thin flat with ribs (CT) ZPY2004 ZPY3507 ZPY4010 ZPY02 2 x 4 3.5 x 7 4 x 10 2 M4 x 0.7 M5 x 0.8 ZPY04 ZPY06 ZPY08 ZPY10 ZPY13 ZPY16 ZPY20 ZPY25 ZPY32 ZPY40 ZPY50 4 6 8 10 13 16 20 25 32 40 50 4, 6 tube M5 x 0.8 M6 x 1 ZX M5 x 0.8 M6 x 1 ZR M5 x 0.8 M6 x 1 M8 x 1.25 ZM 4, 6 tube M6 x 1 M8 x 1 ZH M6 x 1 M8 x 1 M6 x

ZP

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: T (Panel Mount Adapter for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: 6, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence, Display:

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: [8] 8(5/16inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: 6.35(1/4inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Bottom, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -