Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Z (Example) C73CZ 3m .. L C73CL None .

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

SQ1000/2000

Stations 1 2 3 4 5 6 7 8 n Lead wire length: L0/Approx. 600mm L1/Approx. 1500mm L2/Approx. 3000mm C8: SUP port C8: EXH port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (A, B port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 threads Formulas: L1 = 11.5n + 44.5, L2 = 11.5n + 59 n:

0.4

45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156

0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

93.5 2 66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

93.5 2 66 9 8 0 40 COM PWR 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A 12 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

4(A) port side: Orange 2(B) port side: Green L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 4 A 4 A 4 A 4 A 41 E 3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

SV

B 2 B 2 B 2 B 1 P 1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5

VQC

M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481 567 14

VQZ1000/2000/3000

2 2 A A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5

VQ4000

1/8 (External pilot port) 73 106.5 59 44 62 50.5 9 9 R4.5 U side 12 X n 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port 4 A 2 B 8 Rc 1/4: Rc 1/4 thread 4 A 2 B A A B A B A B A B A B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3

5 Port Solenoid Valve, Series VQC

M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 Manifold S kitSV5Q21, #6 Valve 2 position single SV5Q21, #7 2 position doubleSV5Q21, #8 3 position SV5Q21, #8 Dustproof SI unit: L5=16+108, L6=L3+25, L7=L4+25 Dust tight/jet proof SI unit: L8=16n+118.5, L9=16n+131 L10=L3+50, L11=L4+50 Dimensions (mm) Equation L1=16+53, L2=16+83 n: Station (Max. 16) L n 2 3 4 5 6 7 8 9 10 11 12 13

42

1(P), 5(R1), 3(R2) port 106.5 1/8" External pilot port 178.5 (3-position) 3.5 10.7 164.4 (Double) 96.2 155.4 (Single) M5 x 0.8 Ground screw 71.7 62.5 106 58.2 49.7 9 9 U side 27 12 X n 4 A 2 B 8 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 4 A 2 B A A B A B A B A B A B A SMC SMC SMC SMC SMC SMC SMC 7 A A A A A A A B B B 4 A 2 B 6 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3 4 A 2

Plug-in Unit

SMC SMC SMC 95.5 101 20.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 SQ 72 12 60 43.5 42.7 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 15.7 21.5 (6.5) 11.5 VQ4 External pilot port 2-Rc 1/8 Pilot exhaust port 2-Rc1/8 27 31 38.7 VQ5 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> P=25 65.5 Rc 1/4: 1/4" Female thread VQZ Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 :

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

ass'y for 6 C8: One-touch fitting ass'y for 8 Residual pressure release manual override (33) (41.5) 1.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n+24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266