Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -
D-F6N/D-F6P/D-F6B [The voltage drop will be n times larger when n auto switches are connected.] Even though an auto switch operates normally, the load may not operate. Operating Environment Caution 1.Do not use in an environment where there is excessive impact shock.
L D-A73 (Example) MRQ Lead wire length D5 m None Nil L 0.5 m 3 m Z N 20Applicable for the connector type (D-C) only.
L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.
L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.
Integrated clevis type Note 1) Single clevis type Note 1) Bore size (mm) Seal kit no. Kit components Double clevis type Note 3) Note 1) Front trunnion type (1 pc.) Note 2) 20 25 CM2X20-PS Rear trunnion type (1 pc.) Note 2) Rod seal: 1 pc. CM2X25-PS 32 40 Boss-cut basic type (1 pc.) CM2X32-PS Grease pack (10g): 1 pc. Boss-cut flange type (1 pc.)
M6.5 1 10 100 1000 10 10 The number of particles larger than 0.1 m in an air volume of 1m3 is expressed in 10 N.
N.C. 1 5 3 3 Resin Piston Pilot valve assemblies Note) SQ23 VQ111S(Y)(N)J31-1 Type No. 5 6 5 6 5 6 4 For single VQ110SLJ32-1 Negative COM: VQ110SNJ32-1 5 For double (latching) For double (double solenoid) on A side 5 6 VQ111S(Y)(N)J23-1 6 For 3P, dual 3 port on A side For double (double solenoid) on B side 5 6 VQ111S(Y)(N)J34-1 7 For 3P, dual 3 port on B side Note) Nil: Standard N: Negative
45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156
) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:
VVQ2000-P-1-C8 N9 Individual EXH spacer VVQ2000-R-1-C8 N9 EXH block plate VVQ2000-19A C8 (EXH port) 8 One-touch fitting C8 (SUP port) 8 One-touch fitting One set includes 2 pcs.
VVQ2000-P-1-C8 N9 Individual EXH spacer VVQ2000-R-1-C8 N9 EXH block plate VVQ2000-19A C8 (EXH port) 8 One-touch fitting C8 (SUP port) 8 One-touch fitting One set includes 2 pcs.
side: Orange 2(B) port side: Green 12.3 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 58.4 E 4 A 3/5 3/5 E 4 A 4 A 4 A 82.7 101.2 77.3 2 B 2 B 2 B 2 B 63.8 P 1 P 1 5 5 3 E 1 P 3 E 1 P 12 1 1 1 1 Individual SUP spacer (For DIN rail mounting) (10) Individual EXH spacer 14.7 L Dimension n: Stations L n 2 185.5
A, B port size (inch) A, B port size (metric) A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M P, E port Applicable series P, E port Applicable series 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch
P 1 5 3 E 1 P (Station n) (Station 1) Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator Individual EXH spacer 82.7 77.3 63.8 SV3000-M1Interface regulator 12 (For DIN rail mounting) (10) B B B B 14.7 157.9 139.9 A A A A B A B A B A B A L Dimension n: Stations L n 2 185.5 175 121.5 17.5 97 3 198 187.5 142 13.5 117.5 4 223 212.5 162.5 16 138 5 235.5 225 183
block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 23 12 20.5 8 77.5 95.5 75.5 61.5 1.5 43.5 11.5 21.5 (6.5) 27 31 38.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 2-Rc 1/8 (Pilot EXH port) Formulas: L1 = 25n + 106, L2 = 25n + 241 (for 1 input block.
pressure release Manual override (For C6, C8) (5) 10.5 U side D side Stations 1 2 3 n ( 9.5) 45 65.5 ( 9.5) 22 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 7 (59.5) 58 20.5 Residual pressure release Manual override (33) (41.5) 1.5 C8: One-touch fitting assembly for 8 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 B B B 2 2 2
Note 1) Note 2) Note 3) 2-5-19 Base Mounted 20 Series VQ4000 Kit (Lead wire cable) L 2-Rc 1/8 (Pilot EXH port) 38 70 18 18 2-G 3/4 (Electrical entry) 17.5 PE 30 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port 42 Rc 1/4: Rc 1/4 thread R2 R1 5 P 1 3 Rc 3/8: Rc 3/8 thread SMC C8: One-touch fitting for 8 6-Rc 1/2 1(P), 5(R1), 3(R2) port C10: One-touch fitting for 1 C12: One-touch fitting for 12
4 5 6 7 Stations D-side 8 U-side M12 Female thread 2-C8 3(R) port 0 DIN rail clamp screw 1 62.5 60 (12) 40.5 25 9.5 7.5 18.5 M12 Male thread 20.5 (7.5) 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 93.5 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 55.5