SQUARE FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM LB P 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 4 2 1/4 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 1/8 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 1/
FRONT SQUARE FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM LB P 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 4 2 1/4 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 1/8 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16
Wiring specification L side R side L R O-ring NBR 4 AXT502-19 Side Bottom A B O-ring NBR 2 AXT502-20 Cylinder port size Plate SPCC 1 AXT502-22-2 Rc1/4 Rc3/8 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 02 03 C6 Note 1) Gasket NBR 1 AXT502-31 Oval countersunk head screw SWRH3 2 M4 X 8 C8 Note 1) C10 Note 1) Note 1) Side ported only 31 Series VQ7-8 Manifold Exploded View D side
0 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 3 2 A 14 U side D side D side U side 0 1 0 1 5 4 5 4 2 3 2 3 B 12 B 12 B 12 B 12 B 12 7 8 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-DXPD 1 set EX600-DYPB 1 set EX600-WSV1 1 set EX600-EU1 1 set SS5Y3-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit:
(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 W DC (42 mA) 24 VDC 2 position double (Rubber) 3 position closed center 1 W DC (83 mA) 12 VDC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2)
Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8
Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8
Combination description Holder mounting bracket Spacer length X417 X416 1 2 1 1 1 1 1 A, L, AS, LS X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on A unit side, X417 on the other side X416 on L unit side, X417 on the other side X417 on one side X417 on both sides X417 on A unit side X417 on L unit side Nil W Z A L
direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (
port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Thread type Type S42 20 20 stations Solenoid on same side of A and B port Type VK334 Type VK3140 V100 S Nil Rc Q CE-compliant Nil CE-compliant Port size R port: Rc 1/8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body
1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !
1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !
MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve:
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)