Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

QQ section detail drawing CX DNotch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counterbore depth OL B-NN depth NL XX section -X Z WA 20Q 45 RA X0.02 Data RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable

Turntable Cylinder Series MGT

c d e XAH7 XC XL (mm) X X0.02 a b c d e Bore size (mm) XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T

Smooth Cylinder Series CQSY

B dimension is 77.5 mm. Example Calculation:25, B dimension 27.5 mm (without switch) 27.5 (B dimension) + 50 (st) = 77.5 (mm) 2 Series CQSY Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQSS.

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 T2 17 18.7 17 18.7 18.7 20.8 20.8 21.8 25.6 28.2 25.6 28.2 28.2 32.6 32.6 34.7 42.2 44.7 43.9 46.4 51.3 54.1 64.2 66.3 13.2 15.2 13.2 15.2 15.2 18.5 18.5 21.7 1/4" 5/16" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" ASP330F-N01-07S ASP330F-N01-09S ASP430F-N02-07S ASP430F-N02-09S ASP530F-N03-09S ASP530F-N03-11S ASP630F-N04-11S ASP630F-N04-13S 10.5 35.1 39.5 33.9 11.8 1/2" 10-32 UNF NPT 1/8 8 14.2

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: B (PNP; PNP), Option 1: w/Lead Wire w/Connector, Unit Specifications: M (SI Unit Only)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: B (PNP; PNP), Option 1: w/Lead Wire w/Connector, Unit Specifications: M (SI Unit Only), Option 2: R (With Bracket)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: B (PNP; PNP), Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: Without Bracket, Calibration Certificate: A (With Calibration Certificate)

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Output Specifications: B (PNP; PNP), Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: PNP; PNP, Option 1: w/Lead Wire w/Connector, Unit Specifications: SI Unit Only, Option 2: -, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: PNP; PNP, Option 1: w/Lead Wire w/Connector, Unit Specifications: SI Unit Only, Option 2: With Bracket, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: PNP; PNP, Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: Without Bracket, Calibration Certificate: With Calibration Certificate

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: PNP; PNP, Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: With Bracket, Calibration Certificate: -

IR1000/2000/3000

x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

ZL3-OM00801

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Dual Speed Controller with One-touch Fitting Series ASD 1

0 Body A Elbow body Handle Body B Body B Needle Seat ring Needle guide Lock nut Lock nut Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Black zinc chromate plated NBR NBR NBR NBR NBR NBR Stainless steel, NBR PBT, Brass (2) Brass(3) Note 1) 10, 12, 3/16", 3/8" are made of POM, stainless