C95

2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W

Table of Contents

36: T-slot pitch U N x P 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Modular F.R.L. Unit

Recommended tightening torque Unit: Nm Connection thread Torque 1/8 1/4 3/8 1/2 3/4 1 12 to 14 M5 7 to 9 22 to 24 28 to 30 28 to 30 36 to 38 After tightening by hand, tighten further approximately 1/6 turn using a tightening tool. Adjustment Warning 1. Regulator and filter regulator 1. Set the regulator while verifying the displayed values of the inlet and outlet pressure gauges.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Number of pages has been increased from 20 to 28. YU A flow adjustment valve (0.05 to 5 L/min) has been added. A 2 to 200 L/min flow range option has been added. A rear ported type has been added. Number of pages has been increased from 28 to 32.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Y Z X N N Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ Standard port Non-locking type manual release 45 Relief port 32, 40 (mm) LZ LX LT LD I DL B2 A 11 8 8 8 13 F Bore size H2 HC 30 28 28 25 LH LS G H H1 MM 134 104 102 102 AL K LC 22 17 17 13 B 41 32 32 26 B1 D 55 40 40 40 4 4 4 4 7 6.8 6.8 6.8 7 5.5 5.5 5 46.5 37.5 33.5 28 14 12 10 8 21 19.5 19.5 15.5 29.3 27 24 50 45 45 41 6 6 5 8 8 8

smcmaintenancepartslist

Contents Bore size (mm) @6 @7 28 @9 #0 31 #2 33 Lube type Piston seal Rod seal 40 50 63 80 100 CVS1-40-PS CVS1-50-PS CVS1-63-PS CVS1-80-PS CVS1-100-PS Cushion seal Set of left nos. @6, @7, @9, #0, #2, #5 Cylinder tube gasket 28, 31, 33 and 34 are non-replaceable parts, so they are not included in the seal kit.

Modular F.R.L. Unit

Page 23 Page 28 Mist Separator Page 29 Micro-Mist Separator Page 32 . Air Filter + Regulator . Filter Regulator . Made to Order Specifications . Modular Type Filter Regulator AFM20 to 40 .

Best Pneumatics Vol. 14

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR Recommended Tightening Torque (Nm) Connection thread Torque VEX 1/8 1/4 3/8 1/2 3/4 1 12 to 14 M5 7 to 9 22 to 24 28 to 30 28 to 30 36 to 38 AMR After tightening by hand, tighten further approximately 1/6 turn using a tightening tool.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

34 45.1 [60.6] 21.6 28 34 [40.5] 31.1 31.1 15 21 21 25 25 10 10 97.6 18 18 97.6 [ ] for AC Other dimensions are the same as the grommet style

MGP

28 11 M12 X 1.75 80 100 28 48 52 72 75 90 128 148 300 320 92 85 178 171 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Demensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 200st< 50st< 200st 50st< 200st 200st< 25st< 50st 25st< 50st 200st< 50st< 200st 50st< 200st 50st 50st 200st< 25st 25st 160 180 63.5 64 80 100 115 137 142 162 18.5 21 45.5 46 30 36 80 100 109.5 121 130

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) Width across

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A J L B C D E F G H 0.25 K 1/4-28 NY-075 0.51 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 3/4", 7/8" NY-106 0.51 0.25 5/16-24 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 1 1/16" NY-125 0.75 0.38 7/16-20 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 1 1/4", 1 1/2" NY-G050 0.75 0.38 1/220 1/2-20 1.32 1.69 0.94 0.38 0.75 1.02 0.31 2" Material: Carbon steel Jam nut (Rod thread) (in)

CJ5-S

18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7

Micro Mechanical Valve Series VM1000

F.O.F. 6.5 mm 1.7 mm 4.8 mm 21 N VHK 25 28 2 x 3.2 mounting hole 5 x 1/8 VH Push button (Flush) VZM550-01-33 Panel mounting hole VHS 38 23 T.T. O.T. P.T. VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

CJ5-S

) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 0.1 0.3 NX + 0.2 0 A1 U1 RE A B L1

Integrated Controller

(Red Green Red) Electrical entry direction In-line Wiring type 3-wire 2-wire Output type NPN PNP Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less

CG5-S

GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Axial piping

CA2

Cotter pin size CJ1 Flat washer 16 M14 x 1.5 13 55.5 3 x 18l Polished round 12 22 25 24 12 55 38 40 Y-04D +0.3 +0.1 CJP CJ2 16 M18 x 1.5 15 55.5 3 x 18l Polished round 12 27 27 28 12 60 38 50, 63 Y-05D +0.3 +0.1 CM2 28 M22 x 1.5 19 76.5 4 x 25l Polished round 18 37 28 36 18 71 55 80 Y-08D +0.3 +0.1 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-