Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Direct Solenoid

= Mounted on Stacking lranilold Block 3/8' NPTF Sid Ports (il) 23 = Mounted on Stacking Manifold Block 3/8" NPTF Sld Ports (4), Bottom Pods (a 28= Mounted on Stacklng Manifold Block 3r8" NPTF Side Ports (6), Bottom Ports (5) 4t = Mounted on Slacklng Manifotd Block l/2" NPTF Side Ports (4) ilvs/o34 01 = Mountad on Individual Subplat . 3/8' NPTF Slde Porrs (5) 02 = Mountad on lMi\ridual Subplate

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VCW

Proper tightening torque Nm Tightening torque for piping Connection threads 7 to 9 Rc(PT) 1/8 12 to 14 Rc(PT) 1/4 22 to 24 Rc(PT) 3/8 28 to 30 Rc(PT) 1/2 28 to 30 Rc(PT) 3/4 5.

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Description Material Part No. o Clamp A Steel plate AXT625-4A @ Clamp B Steel plate Subplate Bas Cv:0.9 O-ring NBR AXro50-031 O-ring NBR AXT625-36 O-ring (3 req d) NBR AXT625-34 G O-r'rng NBR AXr625-35 o Adapter AXT625-28-1 Terminalassy AXT625-28-24 o C.onduit cover assy NWF2000-4A( stations Note) Subplate shown: Plug-in typ wilh tenninal. Main Parts No. Description Part No.

-fl Seies

Description Material Part No. o Clamp A Steel plate AXT625-4A @ Clamp B Steel plate Subplate Bas Cv:0.9 O-ring NBR AXro50-031 O-ring NBR AXT625-36 O-ring (3 req d) NBR AXT625-34 G O-r'rng NBR AXr625-35 o Adapter AXT625-28-1 Terminalassy AXT625-28-24 o C.onduit cover assy NWF2000-4A( stations Note) Subplate shown: Plug-in typ wilh tenninal. Main Parts No. Description Part No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002FS3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002FS 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052FS 19.6 24.6 17 38 28 AS-30L AS3002FS4.5 24.8 29.8 22 43 33 4.5 6.5 9.5 15.5 1.4 AS-40L AS4002FS 25.7 30.7 28 49 39 Part no.

3 Port Air Operated Valve

VZA VTA VPA342 VPA542 VGA VPA VPA 21.5 28 VPA3 15 22 1563 3 Port/Air Operated Valve Base Mounted/Single Unit VPA300/500/700 Series How to Order VPA 3 4 4 1 01 A Series 3 5 7 VPA300 series Type of actuation A B N.C. (Normally closed) N.O.

PFxx-OMJ0005CN

/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L 8 (35) (25) 5.5 (10) Rail mounting hole pitch: 12.5 0 10 20 1 11 2 12 3 13 4 14 5 15 6 16 7 17 8 18 9 19 No. 98 223 348 110.5 233.5 123 248 135.5 260.5 148 273 160.5 285.5 173 298 185.5 310.5 198 323 210.5 335.5 L dimension 24.8 56.4 88 28 59.6 31.1 62.7 34.3 65.9 37.4 69.1 40.6 72.2 43.8 75.4 46.9 78.6 50.1 81.7 Weight (g) 53.3 84.9 30 40 21 31 41 22 32 23 33 24 34 25 35 26 36 27 37 28

PS-OMH0005CN

(mm 2) (mm) SMC(1) 0.81.0 ZS-28-C 1.01.2 ZS-28-C-1 26-24 (28) 0.14-0.2 (0.08) 1.21.6 ZS-28-C-2 1.01.2 ZS-28-C-3 1.21.6 ZS-28-C-4 22-20 0.3-0.5 1.62.0 ZS-28-C-5 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A -15No.PS-OMH0005CN-D No 8 7 CH4_OUT1 6 CH3_OUT1 5 CH2_OUT1 4 CH1_OUT2 3 CH1_OUT1 2 DC(-) 1 DC(+) -16No.PS-OMH0005CN-D ( ) ( ZS-26-A) PSE200-(M)NPN 5 +1 Max. 30 V80 mA 1 V DC(+) CH1_

PSxx-OMS0004CN

(0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02 R1/4(M5) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 ZS-28-CA-4 1 Rc1/4 ZS-31-X175 1 Rc1/8 ZS-31-X188 1 -8No.PS-OMS0004CN-D M12 C3604+AI203(96)FKM (Nm) R1/8 35 R1/4 812 -9No.PS-OMS0004CN-D PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMS0004CN-D PSE20 PSE30 PSE31 PSE570PSE573PSE574PSE570--28 PSE573--28 PSE574--28 PSE570PSE573

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

Digital Flow Switches

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

NCQ8

D-F9PW D-F9PWV D-F9BW D-F9BWV D-F9NW D-F9NWV Electrical entry direction Perpendicular In-line Perpendicular In-line Perpendicular In-line 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution Load

SV

-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0