Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

ASR

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

VS 8-2/VS 8-4

Proper tightening torque (Nm) Tightening Torque for Piping Connection thread 7 to 9 12 to 14 22 to 24 28 to 30 Rc Rc Rc Rc 1 8 1 4 3 8 1 2 5. Piping to products When piping to a product, refer to the operation manual to avoid mistakes regarding the supply port, etc. Back page 5 5 Port Solenoid Valves Precautions 4 Be sure to read this before handling.

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

AC Servo Motor Driver (MECHATROLINK-II type)

Note: Be sure to take out the lead wire between the B2 and B3 terminals. Enlarged View WARNING Be sure to connect the regenerative resistor correctly. Do not short-circuit between B1/ and B2.

AC Servo Motor Driver (MECHATROLINK-III type)

Note: Be sure to take out the lead wire between the B2 and B3 terminals. Enlarged View WARNING Be sure to connect the regenerative resistor correctly. Do not short-circuit between B1/ and B2.

OMR0031

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current Maximum Output current B7 NC

OMR0032

OUT1 DC2(-) <B2> 10k (3) Pulse train signal input circuit The pulse signal input can be selected from the open collector input type and differential input type.

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

LEJ-OM004xx

(If m otor option is with lock, lo ck ca ble is also include d.) 200 to 230 LECSC2-S C2 S1 LECSS1S 100 to 120 *6 The standa rd direction of each c a ble is shaft side(A)..

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20 ML2B 22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25

Manifold Regulator ARM1000/2000 Series

1361213613PVQ Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

LEC-T1_C

Force OUT 1 ON Pin No. 0 [ ] Pin No. 1 OFF Pin No. 2 [ ] b2 Force Output(pin) Output pin No.0 keykey Output pin No.1 Last Output pin No. 78 - (6) TB Ver2.1*LECPA (6-1) SET AX IS.

Electric Actuators

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.

Air Fittings & Tubing

17.46 12.7 14.29 17.46 1 4 28 13.2 10 20.5 17 4.6 30 28 30 5 16 15.2 12 23.5 18.5 6 31.5 31.5 6 32.5 17.46 17.9 17 25.5 21 3 8 34 7 36.5 22.23 36.5 9 17.46 38.5 21.7 17 28 1 2 22 9.6 40 22.23 Reference dimensions after NPT thread installation.

Cylinder with Lock

B1 B2 B3 CN d1 d2 d3 E FL H (Max.) L1 l1 (Min.) l2 R SR (Max.)