Bore Size: 25mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 8mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: Ø32, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø25, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: Ø63, Thread: NPT, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

tapped, Port thread type: Rc, Auto Switches: A93, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Bore Size: 20mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Stroke Reading Cylinder and Counter

to 63 13 NBR 32 Rolled steel Cushion ring B Piston gasket 40 to 63 NBR 14 33 Port seal Cushion valve 40 to 63 NBR 15 34 Joint seal Piston nut NBR 40 to 63 Rolled steel 16 35 Valve seal NBR Port joint 40 to 63 Stainless steel 17 36 Wear ring Valve retainer seal NBR 40 to 63 18 Resin 37 Spacer for switch type Aluminum alloy 12 38 Since there is a possibility of improper operation, please

CE

Cushion (applicable bore size 40 to 63) 1pc. S 3pcs. 3 "n" pcs.

CXT

Direct mounting Wire length (1) (m) Load voltage Rail mounting Special function Style Electrical entry Wiring (Output) Indicator 32, 40 12 to 40 Applicable load 0.5 () 3 (L) 5 (Z) (N) AC DC Perpendicular In-line Perpendicular In-line 3 wire (Equivalent to NPN) A96V A96 A76H 5V IC A72H A72 200V Yes Grommet Reed switch Solid state switch A73 A73H 100V 12V A93V A93 Relay PLC 2 wire A90V

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Turntable Cylinder Series MGT

A93 3m .

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing CY1S6 to 40 !