High Vacuum Angle Valve, XL Series 160 XLA-63 XLA-80 88 196 2.9 (6.39) 90 235 5.0 (11.02) 200 1in=25.4mm Common to all series.
100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.
-12-150 JAL40-12-175 JAL50-16-150 JAL63-16-200 JAL80-20-250 JAL100-24-300 JAL100-27-150 JAL125-27-200 JAL160-33-200 11.5 14 14 17.5 17.5 17.5 23 23 28 35 35 38 55 30 42 42 52 52 52 56 56 70 80 80 88 116 19 25 25 30 30 30 38 38 47 58 58 69 89 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2
Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F
mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 Flange, Foot (1 pc.) C76F32A C76F40A DFlange, Foot (2 pcs. with mounting nut 1 pc.)
Bore size Stroke NCA Standard stroke (mm) Bore size (mm) 32 40 Max. stroke (mm) 200 250 32 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250 C76F40A C76F32A Flange, Foot (1 pc.) DFlange, Foot (2 pcs. with mounting nut 1 pc.)
(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 6-16-65 66 Technical Data 2: How to Mount and Move the Auto Switch Mounting
120 160 200 Flow rate (slpm, N2) AP1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 0.55 80 0.48 70 Delivery pressure (MPa) 2.62 (66.5) Delivery pressure (psig) 0.41 60 0.34 50 0.28 40 0.69 (17.5) 0.21 30 0.14 20 A B 0.07 10 0.88 (22.4) 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1402TA
VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current [A] Refrigerant R407C (HFC) IDF F 50/60 Hz *6 Three-phase 200
0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12
1 Compact Cylinder Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160, 180, 200 With a short overall length, the space-saving cylinder helps to make various jigs and equipment more compact.
1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 32 50 40 Load weight: m(kg) Load weight: m(kg) 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA SOUTH KOREA SMC Pneumatics Korea Co., Ltd.
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
, 300 500 10 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600 1000 20 200, 300, 400, 500, 600, 800 25 1200 25 2 axes 200, 300, 400, 500, 600, 800, 1000 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
Effective after being energized for more than 200 ms when the voltage is applied 1. Power saving circuit The power saving circuit (PWM control) built into the product reduces power consumption via high-speed switching operation with the PWM control circuit after the rated voltage has been applied for approx. 200 ms when energized.
CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222
12 (120) 1500 25 25 to 700 80 21 (210) 1500 32 32 to 1000 80 33 (330) 1500 40 40 to 1000 80 47 (470) 1500 50 50 to 1200 80 84 (840) 1500 63 63 to 1200 80 127 (1270) 1500 80 80 to 1400 80 Symbol 196 (1960) 1500 100 100 to 1500 80 Note 1) When the standard stroke is exceeded, it is outside the guaranteed range.
Lead wire containment groove 8-15-80