Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

Series AK1000

140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

•

PLe " ~,I I' : II jNo 2OOVm 'M A64 I-I. 24 V 12 V A33 1 '~ '" V. 200 VI--_ --+-=--t-t I-t I-j-1 ~~~! c--t-1=Relay. 'W ~~~ -=L= I,PLC I ! I. ' ~ Lead wire length symbols: 0.5 m . Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . .

CLQ

200 Warning 1.

VZ100/300/500

9 160 152 6 112 104 7 128 120 8 144 136 5 96 88 2 48 40 3 64 56 4 80 72 L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232 248 264 280 296 L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor

Fluoropolymer Tubing Variations

TH0604N Color KQB2 Translucent 250 m reel 500 m reel X64 KS KX Reinforced corrugated cardboard specification: Longer length reel/-X64 KM Dimensions KF Dimensions M Model D1 D2 D3 W Weight (kg) H/DL L/LL TH0604N-250-X64 TH0604N-500-X64 200 200 475 475 52 52 120 220 9.4 18.5 D1 KC KK D2 D3 W KK130 DM KDM KB KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 507 FEP Tubing (Fluoropolymer) Inch Size

Bernoulli Gripper

140 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 140 120 160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

120 178 60 10 130 20 198 70 Standard stroke Long stroke (-XB11) 2-5.7 140 218 30 80 44.5 44.5 150 238 90 40 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20-10 has a groove cut

100

180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5

MXQ

140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 +

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

Single Axis Electric Actuator Series LJ1H

Model LC7R-K1A (Refer to page 200 for details.)

SMC Pneumatic Clean Series

mm/s 0.5 to 200 mm/s 8 M8 x 1.25 14 M14 x 1.5 8 M8 x 1.25 14 M14 x 1.5 10 12 10 12 M10 x 1.25 M10 x 1.25 JIS Class 2 +1.4 0 mm 1/4 1/4 1/8 1/8 Vacuum suction port, Relief port Grease Particle generation grade M5 x 0.8 Fluorine grease Grade 2 Grade 1 2 l/min (ANR) Suction flow rate (Reference values) External dimensions and applicable auto switches are the same as 10-/11-CM2.

CLQ

200 100 100 1.

Non-contact Gripper

120 Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] Consumption flow rate [L/min (ANR)] 250 100 160 ZP3 200 80 120/150 120 150 60 ZP3E 40/60/80 80 100 40 ZP2 40 50 20 ZP2V 0 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

CP95

, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250