Environment

) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 121 LEJ Series AC Servo Motor Clean Room Specication

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5 to 150

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

CXT

Tube bore size B, #2(#2+#3) 40 125, 150, 175, 200, 250, 300 55 14 14 3.8-9 Series CXT Auto Switch Specifications Refer to p.5.3-2 for details on auto switch.

Lubrication Equipment

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

NCA1

Oceania SMC Corporation of America (Tampa) 18167 US19 North Suite 150 Clearwater, FL 33764 TEL: (813) 243-8350 FAX: (813) 243-8621 SMC Corporation of America (L.A.) 14191 Myford Road Tustin, CA 92780 TEL: (714) 669-1701 FAX: (714) 669-1715 AUSTRALIA SMC Pneumatics (Australia) Pty. Ltd. NEW ZEALAND SMC Pneumatics (N.Z.) Ltd.

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CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LEC6D-) Refer to page 19 for L dimension and part number of DIN rail. (11.5) (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) Note) When two or more controllers

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Screw mounting), 150 (DIN rail mounting) Note 1) Do not use the power supply of inrush current prevention type for the controller input power supply.

MHL2

150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point

MHL2

150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) 2.2-3 Wide Opening Air Gripper Series MHL2 Example of Model Selection Procedures Check conditions Select possible points

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

Compact Electric Actuator Series LG1

Servo malfunction indicator PL For power supply switching A surge killer should be attached to the electromagnetic contactor and relay. 5Ry Power supply OFF 1MC ON SUP 1MC 5Ry SGDE servomotor Motor 1 1MC SGDE servo pack R U V 2 M 1MC T 3 W 4 1CN 150 PULS 1 2 3 4 5 6 Be certain to ground.

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401 to 1500 270 130 Max. acceleration/deceleration [mm/s2] 20 (Refer to pages 124 and 125 for limit according to work load and duty ratio.)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 Station L1 L2 364 5 Port Solenoid Valve 10-SYJ7000 C6, N7 C8, N9 Type 42: Side Ported/10-SS5YJ7-42Stations [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) L1 Manual

SYJ3000/5000/7000

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 1-5-68 69 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet style. 3 98 70 6 158 130 8 198 170 10 238 210 20 438 410 2 78 50 4 118 90 5 138 110 7 178 150 9 218 190 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 Station L1 L2 1.2-69 Series SYJ7000 42 Type Manifold: Side Ported/SS5YJ7-42Station -C6, C8 Grommet(G), (H) 4-4.5 (Mounting holes)