SV

30% 10% 30% 50% 70% SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600

3 Port Solenoid Valve Metal Seal Series VZ200 1

: VZ4 5-D(Z)L plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

4 NPTF P(SUP) port 1/4 NPTF 21 10 R(EXH) port 41 DIN connector (Y) L type plug connector (L) 88.5 300 (Lead wire length) Pg.7 Indicator light 92.5 MAX.10 Indicator light 56 R 3 1 P Cover diameter 1.5 Applicable cord O.D.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) The value is a guide when SMC's series LCI controller is used and may vary depending on the driver capacity. 300 2.1 1.3 0.8 0.5 0.4 600 1.4 2.0 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

71.4 About 300 98.6 79.4 [82] 52.6 [59.1] About 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 28 5-M5 0.8 (Piping port) 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 27 Series SYJ3000 Valve Drawings 3 Position Closed Center /

ISO Cylinder

, 25, 40, 50, 80, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

HRX-OM-Q026

HRSH Series 7.4 Operation Stop for an Extended Period of Time 7-9 HRX-OM-Q026 Chapter 7 Control, Inspection and Cleaning 7.4 Operation Stop for an Extended Period of Time HRSH Series 7-10 HRX-OM-Q026 Chapter 8 Documents Chapter 8 Documents 8.1 Specifications 8.1.1 HRSH100/150/200/250/300-A-20Table 8-1 Specifications of HRS100/150/200/250/300-A-20Model HRSH100-A HRSH150-A HRSH200-A HRSH250

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Min.operating pressure (1) (1) 10 to 50C 10 to 50C Ambient and fluid temp.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

17 10.5 PE port (Rc(PT)1/8) (Rc(PT)1/8) VP 3-Rc(PT)1/8,1/4 10 (Rc(PT)1/4) 18 P/A/R port (Rc(PT)1/4) VQ DIN terminal (Y): VQZ2l5(R)-lYl01 02 01 02 L plug connecter (L): VQZ2l5(R)-lLlVQZ VZ Indicator light 83(84) 300 VS (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 53(56.5) 87 MAX.10 Applicable cord O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

LEF-OM006xx

kg) W(kg) W(kg) 15 10 8 10 12 12 6 10 4 5 2 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 12 20 10 W(kg) W(kg) W(kg) W(kg) 15 8 6 10 5 5 4 6 6 10 12 10 5 12 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V (mm/s) -11- 2.2 LEF/ (1)(DC24V) LEFB16 LEFB25 LEFB32 (mm) 1) (300),500, 600,700 .800(900 1000 (300),500, 600,700 800 900 1000

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Lead wire length) Pg7 Approx. 300 (Lead wire length) Max. 10 Applicable code O.D. 3.5 to 7 Refer to the page 91 for dimentions with connector cable.

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.