V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.

IDU/IDF

B C D E F IDF1D-1 to 11C-1 IDU3D-1 to 11C-1 200, 220 230, 240VAC (50Hz) 200 to 260VAC (60Hz) IN PUT VOLUTAGE SELECTOR 100VAC (50Hz) 100 to 110VAC (60Hz) Single phase Single turn IDF-TR500-2 500VA 118 140 163 70 112 6 5.5 x 10 (Long hole) E D 4-F IDF15C-1 IDU15C-1 Input cord 2m IDF-TR1000-2 1kVA 118 140 208 70 157 10 IDF-TR -3, 4 C VOLUTAGE SELECTOR Dryer Weight (kg) Part No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 200 st 100 st 100 st 75 st 75 st 0 0 0 0 0 0 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 3 (Slide bearing type) 2.5 800 st Deflection Y (mm) 2 700 st 600 st 1.5 500 st 1 300 st 400 st st: Stroke (mm) 0.5 100 st 200 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 4 (

MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Proposals for Energy Saving

Cylinder bore size/Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches /Refer to page 5.3-2 of "Best Pneumatics No. 2" for auto switch related information.

Air Cylinder Series MB

D-A3 D-G39 D-K39 n (different side) 90 + 100 (n2) n = 2,4,6,8... 125 + 100 (n2) n = 2,4,6,8... n (same side) 1 60 65 75 80 85 90 90 90 2 (different side) 2 (same side) 70 75 80 85 70 75 80 85 70 + 30 (n2) n = 2,4,6,8... 70 + 50 (n2) n = 2,4,6,8... 75 + 30 (n2) n = 2,4,6,8... 80 + 30 (n2) n = 2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 75 + 50 (n2) n = 2,4,6,8... 80 + 50 (n2) n = 2,4,6,8... 85

Tie-rod Type Hydraulic Cylinder

TY TZ V l Z H Z ZZ e f h ZZ 40 R0.5 16 70 60 95 7.5 8 66 58 182 55 25 92 84 208 50 R0.5 16 83 73 108 10 9 73 65 201 60 28 99 91 227 1/4 stroke 63 R0.5 16 90 80 115 12 10 80 72 212 65 30 106 98 238 80 R2.5 30 112 100 162 16 13 90 75 230 80 32 116 101 256 100 R2.5 34 140 118 204 20 16 100 83 250 100 35 123 106 273 1/5 stroke 125 R2.5 34 170 140 234 20 16 100 83 252 100 35 123 106 275 160 R2.5

CLS

] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

7

W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 9 100 9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

CS1

72 8 48 105 M30 X 1.5 30 47 53.1 46 18 44 M30 X 1.5 Y-16 40 32 80 8 55 110 M36 X 1.5 34 46 63.5 55 21 53 M36 X 1.5 Y-18 50 40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

SY

200 0 100 200 300 400 500 600 700 0 50 100 150 200 250 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 238 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Slovenia d.o.o.

Table of Contents

-XC12 to -XC21: Change of Angle Adjusting Range (0 to 100, 90 to 190) . -XC22: Without Inner Rubber Bumper, -XC30: Fluoro Grease. -X6: Shaft, Parallel Key Made of Stainless Steel Spec. Series MSQ Rotary Table Rack & Pinion Style Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 . Features. Model Selection .

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63