LEF-OM006xx

100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200,

JXCx-OMT0001CN

-107No.JXC-OMT0001CN-C 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 mm/s 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] () 15 8 4 18 9 5 24 12 6 24 12 6 [mm/s] () 22 12 6 26 13 7 34 17 9 34 17 9 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20

Slider Type/Ball Bushing Bearing

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Series AP500

300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Support Guide/11-LEFG Series

150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207 330 6 2 300 11-LEFG32-S-250 400 257 380 11-LEFG32-S-300 450 307 430 11-LEFG32-S-350 500 357 480 8 3 450 11-LEFG32-S-400 550 407 530 11-LEFG32-S-450 600 457 580 Model L A B n D E 11-

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Air Cylinder NCQ7 Series Compact Cylinder

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

Series VQ Metal Seal/Rubber Seal Body Ported

Dimensions (mm) Equation L1=10.5n+14.5, L2=10.5n+25 n: Station (Max.16) n L 1 2 46 56.5 225 235.5 6 88 98.5 262.5 273 3 56.5 67 237.5 248 7 98.5 109 275 285.5 4 67 77.5 250 260.5 8 109 119.5 287.5 298 5 77.5 88 250 260.5 9 119.5 130 300 310.5 10 130 140.5 312.5 323 14 172 182.5 350 360.5 11 140.5 151 312.5 323 15 182.5 193 362.5 373 12 151 161.5 325 335.5 16 13 161.5 172 337.5 348 L1 L2 L3

VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

225 235.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 3 58 68 87.5 98 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 L1 L2 L3 L4 31 Series VQZ Base Mounted Type Dimensions: VQZ300 VQZ300 (mm) VV3QZ35C Stations Port size

C95Series

(mm) =~ J Standard Stroke Refer to page 19 on "Minimum Allowable Stroke When Mounting Auto Switches ~. 32 ' 25,50. 75,100, 125,150, 175, 200, 250,300, 350,400, 450,500 700 ~; 40 25, 50, 75, 100, 125, 150, 175. 200, 250, 300, 350, 400, 450, 500 800 SO 1200 25, 50, 75,100, 125, 150, 175, 200, 250, 300, 350, 400,450. 500, 600 63 25. 50,75,100. 125,150, 175,200, 250. 300, 350,400, 450,500, 600

Magnetically Coupled Rodless Cylinder

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

size 15 Symbol 40mm Nil 20, 25, 32, 40 TN TF Standard Stroke Note 1) Bore size (mm) Standard stroke (mm) Maximum stroke availabe (mm) 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke

VFS

Bore size Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 300 mm 125 140 160 180 200 250 300 Average speed (mm/s) Series VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ VFS5100-06 VF 0 VFR It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being

Series AK1000

400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig

Table of Contents

300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate /min(ANR) Flow rate

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1