%silltr

The size of the stopper delines lhe rotalion angle of 90, 180 or 270'. Adjustable stops may be provided to adjust any angle ot rolation of the unit. ,rOar*$ 180' 900 Fig 6,22 Vane Type Rotary Actuator I Z I N G R O T A R Y A C T U A T O R S orque and Inartia Linear cylinders have a cushion to reduce the impact when lhe piston hits the cover.

Table of Contents

Functions . 159 160 162 162 163 163 164 165 166 166 168 168 168 168 169 169 169 170 170 170 171 172 175 175 175 175 176 177 178 178 178 178 179 179 179 180 180 180 181 182 187 187 187 187 188 188 188 189 190 192 193 197 197 198 198 198 198 199 199 199 200 201 203 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

SX

100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 120 160 170 170 180 200 200 200 190 Basic VZM450-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM450-01-01 VZM450-01-01S Hard steel roller VZM450-01-02 VZM450-01-02S Polyacetal roller Hard steel roller One way roller lever Straight plunger VZM450-01-05 Polyacetal

CQS

Example 7-4-5 6 Series CQS Weight/Without Auto Switch (g) For standard stroke Calculation: (Example) CQSD20-20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

IDG

100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

AC Servo Motor Driver (CC-Link Type)

360 629 90 180 360 Home position return position data (m) PC07 0 -4000 (Less than stroke 1000) / -400(Stroke 1000 or more) Stopper type home position return PC09 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PC10 15 30 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032)/ 0003 (LEC-MR-RB-12) 1 Rotation direction selection *4 PA14 0 0 (+Counter motors

0.4

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Locking type (Tool required) VQZ100 Black (DC) Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red If the manual override is turned by 180 clockwise and the mark is adjusted to 1, then pushed in the direction of an arrow (), it will be locked in the ON state.

HRL

V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option) CH1 0.1 15 to 25 HRL Inverter dual type 26 kW Indoor use 19 kW 9 kW CH2 0.5 20 to 40 1.0 kW (Max. 1.5 kW) 322 Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 9-15-71 72 Technical Data 2: How to Mount and Move the Auto Switch Mounting

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

Electric Actuator / Slider Type 《 AC Servo Motor 》

Home position return position data (m) PC07 0 -2000(Less than stroke 1000)/ -200(Stroke 1000 or more) Stopper type home position return stopper time (msec) PC09 100 200 Stopper type home position return torque limit value (%) PC10 15 30 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08