Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

IDG

173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

C85

40 4.5 22 26 11 25 73 68 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

SY

(Connector, socket x 2pcs. only) 2 200VAC 50/60Hz Lead wire length Note 2) "R" and U" specifications are only available for DC. 110VAC 50/60Hz [115VAC 50/60Hz] 3 300mm Nil Electrical entry 4 220VAC 50/60Hz [230VAC 50/60Hz] 6 600mm G Grommet (lead wire length: 300mm) H Grommet (lead wire length: 600mm) 1000mm 10 15 20 25 30 50 1500mm 2000mm 2500mm 3000mm 5000mm L With lead wire L type plug

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Same side 75 90 120 (n 4) 2 120 + 50 (n 2) 2 90 + 50 (n 4) 2 20 + 50 Different sides D-B59W n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6 120 + 5 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6, 8 120 90 1 pc. 15 35 80 90 Different sides 75 100 Same side 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

Possible to transfer a workpiece at low-speed.

Low-Speed Rotary Actuator CRQ2X/MSQX Series CRQ2 Size: 10, 15, 20, 30, 40 MSQX Size: 10, 20, 30, 50 Possible to transfer a workpiece at low-speed. CRB2 CRB1 MSU CRJ CRA1 Realized a stable motion at 5 s/90.

Secondary Batteries

, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

REA/REB

(N) 500 400 CEP1 500 300 300 CE1 200 200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W

LEY-OM007

] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg)

Table of Contents

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For 100 VAC: SY100 30 1A Groove Cover For 200 VAC: SY100 30 2A Pin Cover For other voltages of AC: SY100 30 3A Groove DC polarity display Lever Pin Without lead wire: SY100 30 A Lead wire length -+ Socket (with connector and 2 of sockets only) Lead wire Nil 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm (For DC) 10-SYJ3123-5LO-M3 SY100-30-4A-20 Connector How to

Series IDG

0.7MPa 20 20 30 30 40 40 50 50 600 0 200 400 800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet