0.4

VF VP4 Cylinder port SUP port EXH VQ 1/2 2, 4 (A, B) 1, 3 (P, R) VQ 4/5 VQC 1/2 VQC 1/2 25-core cable 26 pins VQC 4/5 25 pins 26 pins 20 pins IP67 compliant IP67 compliant IP67 compliant VQZ SQ VFS VFR VQ7 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C10 (10) C4 (4) C6 (6) C8 (8) N11 (3/8") In case of branch type C12 (12) N13 (1/2") N3 (5/32") N7

CL

25 32 36 40 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/5 Stroke 1/5 Stroke 1/5 Stroke 368.5 377 415 391.5 400 436 3.1-62 World Wide QS\E Support...

Table of Contents

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

LX

(5) Cable length 2000 2-M3 x 0.5 depth 5 17.5 18.5 10 20 (5) 62 72 (15) 8 5 22 1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

42

Note Option mounting diagram Single valve AXT632-25-4 (M4 x 50) 4 Valve 0 Blanking plate (VVQ5000-10A1 5) AXT632-25-8 (M4 x 17) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ5000-P1 5 -03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34) 2 Valve + Individual EXH spacer (VVQ5000-R1 5 03 04) q AXT632-25-5 (M4 x 82) 4 For manifold w AXT632-25-10 (M4 x 34)

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

CXS

M3 x 0.5 through 25 0.2 4 ST 5 + ST 9 + ST 32 + ST 42 + ST Part no.

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15

MHZ

5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

MHZ

5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

Aluminum High Vacuum Angle Valve

type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

Air Fittings & Tubing

(inch) Fitting size d (inch) (1) Weight (g) D1 D2 L1 L2 A M 9.6 10.4 11.4 13.2 15.2 17.9 21.7 7 8 10 10 12 13.6 17 17 18 19.5 20 22.5 25 28 24.5 25 34 27.5 31.5 35 44.5 14 14.5 23.5 17.5 21 23 34 15 16 16.5 17 18.5 21 22 2.2 2.5 3.5 4.6 6 7 9.6 3 3 7 8 6 19 27 KQ2L01-99 KQ2L03-99 KQ2L05-99 KQ2L07-99 KQ2L09-99 KQ2L11-99 KQ2L13-99 1 8 1 8 5 32 3 16 1 4 5 32 3 16 1 4 5 16 5 16 3 8 1 2 3 8 1

CL

5 !6 !7 !8 !

CM2

185 210 17 35 25 72 85 97 110 135 12.5 25 37.5 50 75 149 162 174 187 212 17 35 32 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 19 46 40 Rear flange Built-in One-touch fitting CM2G20SCM220A, #5 SCM220A, #5, #19 CM2G25SCM225A, #5 SCM225A, #5, #19 CM2G32SCM232A, #5 SCM232A, #5, #19 CM2G40SCM240A, #5 SCM240A, #5, #19 The data shows auto switch equipped styles.

KJ

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

TABLE OF CONTENTS

VALVE Pressure Differential . . . . . . . . . . . 25 PSI 15 PSI Vacuum. . . . . . . . . . . . . . . . . . . . . . . down to 5 microns down to 5 microns Repair Packs . . . . . . . . . . . . . . . . . . K72TDD (A.C. or D.C.)

Table of Contents

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

ZP

ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to page 563 for dimensions with connector cable. 542 5 port solenoid valve Series 10-SYJ7000 3 position closed center / Exhaust center / Pressure center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): 10-SYJ7 23-01 Built-in One-touch fitting: 10-SYJ7 23Air cylinder Rotary actuator Air gripper Directional control