Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

Electric Actuators

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

Table of Contents

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 600 10kg 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 Pitching Yawing 16kg 18kg 20kg Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

V100

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

CATALOG

, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

Battery-less

X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Horizontal/Bottom 500 L2 400 L2 [mm] 300 Y Me m 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 L3 [mm] m 300 L3 Z 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 L4 400 L4 [mm] 300 X Me 200 m 100 0 Work load m [kg] 0 1 2 3 4 5 600 Me 500 400 m L5 [mm] 300 Wall L5 Y 200 100 0 Work load m [kg] 0 1 2 3 4 5 600 500 400 L6 [mm] L6 300 Z

Electric Actuator with Integrated Guide

Controller Allowable Moment (Nm) Allowable dynamic moment LTF8 Model Mounting orientation Load movement direction 300 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep 200 L1 (mm) L2 (mm) L3 (mm) a=1000 Pitching Rolling Yawing m a=2000 a=3000 100 L1 10 50 40 30 20 0 Transfer load m (kg) 300 L2 200 Mer a=1000 a=2000 a=3000 m 100 L2 Mer 10 50 40 30 20 0 m Transfer load m (kg) 300

A

A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

MG

111.5 23 19 240 M14 55.5 56 62 WA S T U VA VB WB Bore size (mm) X YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 42 Over 25 st to 100 st Over 300 st Over 100 st to 200 st 128 Over 200 st to 300 st 25 st or less 25 st or less 80 100 M12 x 1.75 24 28 100 198 156 180 140 28 52 54 75 128 300 92 178 M14 x 2.0 28 11 124 236 188 210 166 48 72 35 47 90 148

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

Table of Contents

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping:8 x 1 m) AS3301F-02-08/AN110-01 Speed controller/Silencer It is when the cylinder is extending that is meter-out controlled by speed

MY1

300 400500 1000 1500 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 5 Series MY1B Mechanically Jointed Rodless Cylinder How to Order Basic Type MY1B Z73 300 25 Number of auto switches Basic type 2 pcs. 1 pc.

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Rated voltage Electrical entry For DC 24, 12 VDC/ 100, 110, 200, 220 VAC DIN terminal M plug connector L plug connector 24, 12, 6, 5, 3 VDC M8 connector Grommet 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC (10-SY5000/7000 only) G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC / 100, 110, 200, 220 VAC 24, 12 VDC 6, 5, 3 VDC M plug connector DIN terminal M8 connector G: Lead wire length 300 mm M: With lead wire (length 300 mm) MN: Without lead wire D: With connector WO: Without

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.