Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) Approx. 300 33.1 48.5[55.5] Refer to page 563 for dimensions with connector cable.

ZP

, 250, 300, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber FKM CR N S F C 32 150 250 300 340 Note) Silicone rubber is only applicable to the 32 pad.

100

(04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative

CLS

+ 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

weight kg Load weight kg MY2H40 MY2H40 MY2H40 10 10 10 MY2H25 MY2H25 MY2H25 5 5 5 4 4 4 3 3 3 MY2H16 MY2H16 MY2H16 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-13-8 9 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 MX 200 200 200 MTS MY

CNA

Standard Stroke ML1C DBore size (mm) 40 50, 63 80, 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 20Stopping Accuracy Data (mm) Piston speed (mm/s) Lock type 100 300 500 1000 0.3 0.6 1.0 2.0 Spring

CNA

Standard Stroke ML1C DBore size (mm) 40 50, 63 80, 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 20Stopping Accuracy Data (mm) Piston speed (mm/s) Lock type 100 300 500 1000 0.3 0.6 1.0 2.0 Spring

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30

Electric Actuator Triple Axis P&P Unit

17.1 150 200 19.2 250 300 21.3 350 400 23.4 450 500 25.5 550 600 27.6 1500 46.5 Stroke(mm) X axis 700 29.7 750 800 31.8 850 900 33.9 950 1000 36.0 1100 38.1 1200 40.2 1300 42.3 1400 44.4 3 Triple Axis P&P Unit How to Order Single Axis LG 240Z 50 Y G J Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol

Table of Contents

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

CG1

to 300 Up to 300 Up to 300 11 11 10 (11) 10 (12) 12 (13) 12 (13) 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 10 (12) 20 25 32 40 50 63 80 100 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 26 31 38 47 58 72 89 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 12 14 18 25 30 32 40 50 14 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26

Profile Design ISO/VDMA Air Cylinder Series CP95

Theoretical air consumption of compressed air piping Average theoretical air consumption of cylinders in a cycle/m. (1 cycle = SWITCH ON/SWITCH OFF) 20 20 1500 2000 3000 1500 2000 3000 Piping bore size[mm] 10 10 1000 1000 160 125 3 4 5 5 150 200 300 400 500 150 200 300 400 500 Air consumption Q [Nl/min.]

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X216 100 IZN10-G-200-X216 200 IZN10-G-300-X216 300 IZN10-G-400-X216 400 IZN10-G-500-X216 500 IZN10-G-600-X216 600 Part no. Bar length [mm] IZN10-G-X278 150 Supply pressure specifications: 0.05 to 0.15 MPa Supply pressure specifications: 0.05 to 0.1 MPa Long nozzle Bender tube nozzle Part no.

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

Air Slide Table Series MXQ

-50 MXQ20-30 MXQ20-100 MXQ20-150 0.08 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-100 MXQ20-20 MXQ20-10 0.04 0.02 MXQ20-10 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125

MVGQ

Rated voltage 3: Main/Pilot valve common exhaust type Electrical entry 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Other 1 2 3 Grommet L plug connector M plug connector DIN terminal G: Lead wire length: 300 mm L: With lead wire (Wire length: 300 mm) M: With lead wire (Wire length: 300 mm) D: With connector 4 5 6 R port P/E port 9 Option H: Lead wire

LEC-OM07605CN

0 50 15 0 250 350 40 0 300 0 50 150 250 350 350 (1,2 [%]) (1,2 [%]) b a 1. ()30r/min100% 2. 300%350%LE-T10.1 10 3 10. 10.2 (1) 10.1 10.1 1 (1) (2) [W] 2] [m [kVA] LECSS2-T5 LE-T50.3 25 15 0.5 LE-T60.3 25 15 0.5 LECSS2-T7 LE-T70.5 25 15 0.5 LECSS2-T8 LE-T80.9 35 15 0.7 LECSS2-T9 LE-T91.3 50 15 1.0 1. . 2

Vacuum Unit

connector length other than 300 mm, order the connector assembly on page 32 separately. t Vacuum (V) port y Option5 (For details on the Function/Application, refer to page 42.)

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port