MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

VQ7-6/7-8

Mounting bolt M6 X 165 with SW M6 X 180 with SW M6 X 185 with SW M6 X 200 with SW Size Option mounting diagram Interface regulator Double check spacer Double check spacer Interface regulator Spacer 1 Throttle valve spacer Spacer 1 Spacer 1 Throttle valve spacer Spacer 1 Spacer 1 Spacer 1 Note 1) A throttle spacer and double check spacer cannot be combined.

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

Stroke Reading Cylinder and Counter

, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60

CE

, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

CG1

JIS symbol Double acting Minimum Strokes for Auto Switch Mounting Stroke Long stroke (2) (mm) Max stroke (mm) Number of switches Bore size (mm) Standard stroke (1) (mm) Auto switch model 2 1 D-C7/C8 D-B5/B6 D-H7 D-G5/K5 25, 50, 75, 100, 125, 150, 200 201 to 350 20 15mm 10mm 301 to 400 25 301 to 450 32 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 15mm 1500 301 to 800 40 D-B59W 301 to 1200

BP1000

Refer to back cover for Safety Instructions and P. 145 and 146 and the Operation Manual for common precautions. Operation manual is available from the SMC web site. http://www.smcworld.com Selection Warning Operation Warning 1. Confirm the specifications.

Air Catch Sensor

300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

KT10

Refer to back cover for Safety Instructions and P. 145 and 146 and the Operation Manual for common precautions. Operation manual is available from the SMC web site. http://www.smcworld.com Selection Warning Operation Warning 1. Confirm the specifications.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

LEC-OM02704CN

(FR-BSF01FR-BLF()) 13 21 13 (2) (a) () TDKZCAT3035-1330NECESD-SR-25 ZCAT3035-1330(TDK) [] [mm] 10100MHz 100500MHz 391 131 341 80 150 301 TDK (ZCAT3035-1330) (b) () ACACAC MC 20cm ()972A-2003 50411 (AC200V) AC[V] C[F] R[] [mm] AC[V] 200 0.5 50(1W) T-C 181.5 1000(15s) 6 10 10 103 103 4 151 31.51 200 200 481.5 DCDC 4 2 RA 13 22 13 (c) AERSBAN-SET SD ( A B ) 40 2-5 17.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ1610 13-/22-MXQ1620 13-/22-MXQ1630 13-/22-MXQ1640 13-/22-MXQ1650 13-/22-MXQ1675 13-/22-MXQ16-100 13-/22-MXQ16-125 Note) Note) Note) Refer to the bottom view of MXQ16-50. 1322813 MXQ 1322Air Slide Table Dimensions: MXQ16

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow

RHC

C J G5-S 100 CV 250 = 0.7 200 MVGQ 0.5 0.1 0.3 150 CC 100 50 RB 0 1,000 2,000 3,000 J Maximum speed Vmax (mm/s) : Cylinder load ratio Vmax: Maximum speed (Refer to page 10-6-5.) D-X 20Data 10-6-19

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10

Stability of suction position,

resistance Excellent heat resistance, and cold resistance Excellent mechanical strength Best heat resistance, and chemical resistance Pure gum property (specific gravity) 1.00-1.20 0.95-0.98 1.00-1.30 1.80-1.82 Impact resilience v g Abrasion resistance u to g Physical properties of blended gum Tear resistance v u to g v Flex crack resistance v u to v v Maximum operation temperature C 120 200

Interface Regulator for VQ4000 5 Port Solenoid Valve

400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/