MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

OMU0023

(Bytes) unit mode D9103 4 Target position [m] Note 1) 1 Note 1) No D9105 2 Positioning time [0.01 s] 1 0 to 6000 No D9106 2 Speed [mm/s] 1 0 to 400 No D9107 2 Acceleration [mm/s2] 1 0 to 60 No D9108 2 Deceleration [mm/s2] 1 0 to 60 No 0 to 20 D9109 2 Pushing speed [mm/s] Note2) 1 No 32768 to 32788 D910A 2 Thrust setting value Note 3) [0.1] 1 More than 10 Note 3) No 0 , 5 , 10 D910B 2 Load

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (mm 2) 14/2 (PA/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/25/3 (A/BEA/EB) area M8 connector 67 (41) 89 (63) L/M plug connector Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 10-SYJ3143 10-SYJ3243 10-SYJ3343 10-SYJ3443 10-SYJ3543 10-SYJ3123 10-SYJ3223 10-SYJ3323 10-SYJ3423 10-SYJ3523 10-SYJ3133 10-SYJ3233 10-SYJ3 10-SYJ3433 10-SYJ3533 Single Double

MY1

impact: P = 0.5MPa For 40 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 Impact speed (mm/s) Impact speed (mm/s) L-unit 1000 1000 Air cushion 500 400 300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

NCQ8

075 (3/4") NCQ8B075-S-PS 106 (1-1/16") NCQ8B106-S-PS Piston seal is included. 150 (1-1/2") NCQ8B150-S-PS 200 (2") NCQ8B200-S-PS 250 (2-1/2") NCQ8B250-S-PS With auto switch Here is the typical, cross-sectional construction.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

Digital Flow Switch

OUT1/2: Orange Digital filter*8 Select from 0.00, 0.05 to 0.1 s (increment of 0.01 s), 0.1 to 1.0 s (increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, or 30 s.

MY2

speed mm/s Piston speed mm/s Piston speed mm/s Load weight/MY2C MY2C/m1 MY2C/m2 MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load weight Nm Load weight Nm Load weight Nm MY2C40 MY2C40 MY2C40 10 10 10 MY2C25 MY2C25 MY2C25 5 5 5 4 4 4 MY2C16 MY2C16 3 3 3 MY2C16 2 2 2 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm

VQC

Kit 1 to 10 stations 4150 S Kit (without unit) Solenoid weight is not included.

OMR0032

s) / Deceleration (or acceleration) (mm/s 2) [Calculation example: Target position] Travel distance: 10 (1.25 10-3) = 8000 [pulses] Travel speed: 12 (1.25 10-3) = 9600 [pulses/s] Acceleration time: 12 120 = 100 [ms] Deceleration time: 12 60 = 200 [ms) 63 - Step Data setting example I/O output setting example Load mass Signal name Description Value Step No.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Rotary Actuator

(Example) For M5: L1 = 10 Applicable shaft types: S, W, Y Minimum machining diameter for d1 is 0.1. Applicable shaft types: S, W, Y The maximum dimension L2 is, as a rule, twice the thread size.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

7ND9071en

or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0 130.0 602 282 17200 1 10 mm or 3/8" 752 441 26900 1 10 mm or 3/8" B1J B1JA Stroke volume dm3 / in3 NPT Piping Air (s) Spring (s) Piping Air (s) Spring (s) Piping Air (s) Spring (s) 6 0.47 28.7 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 10 mm or 3/8" [6 mm or 1/4" (x)] 8 0.9 55

CNA

10 CNG 5 4 3 5 4 3 MNB 2 2 CNA 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNS Maximum speed: V (mm/s) Maximum speed: V (mm/s) CLS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5

CNA

80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-7-7 8 Cylinder with Lock Double Acting, Single Rod Series CNA 40, 50, 63, 80, 100 How to Order Without auto switch L N 50 100 JN D CDNA L N 50 100 JN

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg Load weight kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16 MY2HT16 MY2HT16 3 3 3 2 2 2 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 1 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-13-9 10 Series MY2 Cushion Capacity Cushion Selection Absorption Capacity of Air Cushion and Stroke Adjusting Units