Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ L N VQ110VQ110YVQ110 ZQ1-VQ120Model Push-locking type Non-locking push type / Locking type (Tool type) Manual override Non-locking push type / Locking type (Tool type) Rated coil voltage 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC 12, 24 VDC DC 100 VAC 110 VAC 200 VAC 220 VAC 1 W 1 W 0.5 W 0.6 VA (6 mA) 0.65 VA (5.9 mA) 1.2 VA (6 mA) 1.3 VA (5.9 mA) Grommet
PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series
(Fixed SI unit [L/min, or L, m3 or m3 x 103] will be set for switch types without an unit switching function.)
The product Ground terminal +24V Brown +24 VDC +24V Blue 0V Power supply 0V 24 VDC F.G. Be sure to ground.
Common specifications Rated voltage 5 24 VDC 6 12 VDC Nil Positive common N Negative common V 6 VDC Note) Put nothing for single grommet style and single without indicator light and surge voltage suppresser.
D-A93 D-M9B D-M9N Load voltage 24 VDC 28 VDC or less 24 VDC (10 to 28 VDC) Load current range Indicator light 5 to 40mA (24 VDC) 40mA or less 5 to 40mA Relay, PLC IC circuit, Relay, PLC 24 VDC Relay, PLC 3-wire type Solid state switch 2-wire type PLC: Programmable Logic Controller Refer to applicable auto switch list Page 182.
1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !
Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For sub-plate part no., refer to page 967.
Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)
12 VDC Nil Thread type 6 VDC Rc 5 VDC F N G 3 VDC NPT Please consult with SMC regarding other voltages.
VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)
) 100 or less (at 12 VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1 k Black OUT 12 to 24 VDC + 12 to 24 VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE () side.
Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3
0.52 m3/min at 50 Hz.
Range Setting Enabled Section Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 4 0 to 1717 0 Immediately Pn863 Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 5 0 to 1717 0 Immediately Pn864 Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 6 0 to 1717 0 Immediately Pn865 Setup M3*9 2 SVCMD_IO (input signal monitor) Allocation 7 0 to 1717 0 Immediately Pn866 9
, PLC 5 to 40mA 40 mA or less D-H7B D-H7A1 24 VDC (10 to 28 VDC) 28 VDC or less 2-wire 3-wire Solid state switch Yes Yes Auto switch mounting method is band mounting only.
No. of sta. occupied, 2 stations M3 screw Item Specifications 24 VDC +10%, 5% External power supply For details on specifications and handling, refer to the separate technical instruction manual.
) Servo motor (24 VDC) Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50
OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown 6 2 Blue + SMC FLOW SWITCH 5 1 12 to 24 VDC Series PF2A5 35.8 A 40 UNIT PF2A30-A RESET SET OUT2 NC 8 Load 4 Sensor OUT1 Panel fitting dimensions Black 3 x 7.2 (=21.6) 7 3 Load 8-M3 36 +0.5 0 6.4 Brown 6 2 + Blue 5 1 12 to 24 VDC 1 2 3 4 Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white
Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.