This is a legacy product, and replaced byVFS2210-5DZ-02T

This is a legacy product, and replaced byVFS2220-5DZ-01T, VALCE, SOL 24VDC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, CE, VFS2000 BODY PT 1/8NPT (F), 0.82256 lb

This is a legacy product, and replaced byVNB314A-20A-5DZ, PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 2.17869 lb

This is a legacy product, and replaced byVFS2320-5DZ-02T, VALVE SOL 24VDC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, EF, VFS2000 BODY PT 1/4NPT (F), .92594 lb

This is a legacy product, and replaced byVK332-5DZ-01T, VALVE, SOL, BODY PORTED, VALVE, VK300 SOL VALVE 3-PORT, CD, VK300 BODY PT 1/8NPT, .24702 lb

The latest version can be found hereVF3340-5DZ, VALVE, PILOT, BASE MOUNTED, VALVE, VF3000 SOL VALVE 4/5 PORT, 2F, VF3000 NO SIZE RATING, .84509 lb

This is a legacy product, and replaced byVFS4210-5DZ-Q

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

This is a legacy product, and replaced byVNH233B-15A-5DZ-B VNA/B/C/D 2-WAY MEDIA VALVE. COOLANT VALVE. VALVE. VNA/B/C/D. 7.65067 lb. 1A.

This is a legacy product, and replaced byVK332Y-5DZ-01T VK300 SOL VALVE 3-PORT. VALVE, SOL, BODY PORTED. VALVE. VK300 BODY PORT 1/8NPT. .22046 lb. CA.

This is a legacy product, and replaced byVFR2310-5DZ-02T VFR2000 SOL VALVE 4/5 PORT. VALVE, SOL *LQA. VALVE. VFR2000 BASE MT 1/4. 1.02896 lb. PF.

This is a legacy product, and replaced byVFR3140-5DZ-03T VFR3000 SOL VALVE 4/5 PORT. VALVE, SOL. VALVE. VFR3000. 1.64928 lb. 2D.

Nozzle Type Ionizer

Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Refer to p. 24.) * Not applicable for piping specifications A2(L) and B2(L). * There are cases in which this product will not effectively suppress of the effects of water hammer. It is advised that other measures be taken in such cases.

CL

#5 (#1+#5+#12) CLM2G40SCLM240, #5 (#1+#5+#12) 3.1-21 Series CLM2 Front Flange (F) CAD CLM2F Bore size Stroke Boss cut (mm) BP Bore Stroke range BN 80 90 90 BQ BZ E FZ 75 75 75 82 D 8 10 12 14 B 34 40 40 52 FD 7 7 7 7 GA GC 8 9 9 8 AL 15.5 19.5 19.5 21 C1 30 37 37 47.3 F 13 13 13 16 GB 8 8 8 11 A 18 22 22 24 FX 60 60 60 66 GK 3.5 4 4 4 B1 13 17 17 22 FT 4 4 4 5 BC 38 45 45 52 GD 55 FY 36 B2

Table of Contents

34.5 PAX PB 25 C E C M G 1/2 K G 1/2 B1 3-Rc P E Bracket A 10.5 K B1 B2 Hexagon width across flats 22 A B1 N B2 3-Rc P B1 Bracket H J K L M L M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47

CG5-S

WH 32 (E1) D 21 19 17.3 41.4 6.4 7/16-20 126.4 I 40 19 16.6 17.3 41.4 6.4 7/16-20 134.4 B2 BZ MM AL A 50 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 Plug bolt (4 pcs. included) K KA 8-J 63 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 (F1) C 0.1 80 S + Stroke ZZ + Stroke H 25.4 22.9 23.9 63.5 9.7 5/8-18 193.5 NA 100 31.8 29.3 27.8 69.9 10.7 3/4-16 200.9 80 and 100mm-X165US are a future release.

CJ5-S

Note 2) A grease pack (GR-R-010, 10 g) is included in seal kits. 10-14-12 13 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic style (B): CG5BNS : With rubber bumper GA GB 2-Rc P H1 Width across flats B1 M BM (E1) D I I RE A B MM BZ B2 AL A K KA REC (F1) Plug bolt (4 pcs. included) C 0.1 8-J S + Stroke ZZ + Stroke H NA CX CY Bore size (mm) Stroke range A AL B1 B2 BM BZ C D E1 F1

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.