Compact End Lock Cylinder Series CBQ2 (mm) L L1 A A FV M 80.5 73 7 28.5 32 90 79.5 7 28.5 40 4-FD FT L 92.5 82.5 8 33.5 50 B + Stroke A + Stroke FZ FX 94 88 8 33.5 63 Rod end male threads Dimensions other than A, L and L1 are the same as the front flange type.
AR + Full stroke 118.5 127.5 96.5 6.6 76 9 67 50 130 139 102 9 92 9 90 63 Bore size (mm) Rear flange type/RZQG FZ L M 4-FD 65 18 34 32 72 18 40 40 90 22 50 50 108 28 60 63 FV M M L B + Full stroke FT FZ AH + Full stroke Double clevis type/RZQD (mm) Double clevis CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW 112.5 82.5 10 102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28
LY 56 71 89 109 129 Y 6 8 10 11 14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123 LX 11 12 15 18 22 X 12 16 18 21 24 Model MUL25 MUL32 MUL40 MUL50 MUL63 LH 29 37 46 57 67 LT 3.2 4.5 4.5 5 6 LZ 23 27 31 37 48 Axial foot MUL25SMU25, #2 (#1+#2+#11) MUL32SMU32, #2 (#1+#2+#11) MUL40SMU40, #2 (#1+#2+#11) MUL50SMU50, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ
WH 32 (E1) D 21 19 17.3 41.4 6.4 7/16-20 126.4 I 40 19 16.6 17.3 41.4 6.4 7/16-20 134.4 B2 BZ MM AL A 50 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 Plug bolt (4 pcs. included) K KA 8-J 63 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 (F1) C 0.1 80 S + Stroke ZZ + Stroke H 25.4 22.9 23.9 63.5 9.7 5/8-18 193.5 NA 100 31.8 29.3 27.8 69.9 10.7 3/4-16 200.9 80 and 100mm-X165US are a future release.
95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3
= m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.
95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA
With L-bracket B1 With pivoting bracket B2 With DIN rail mounting bracket B3 Output specification Refer to page 450.
[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5
200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke 2m 2 2m 2 Size Size 100mm 100 100mm 100 5m 5 5m 5 40 32 25 40 32 25 10m 10m A A 1000 1000mm 1000mm 1000 12mm 12mm 16mm 16mm 20mm 20mm A A The length of motor, encoder and lock cables are same.
OUT1 B2 OUT1 B3 OUT2 B3 OUT2 B4 OUT3 B4 OUT3 B5 OUT4 B5 OUT4 B6 OUT5 B6 OUT5 B7 BUSY B7 BUSY B8 AREA B8 AREA B9 SETON B9 SETON B10 INP B10 INP B11 SVRE B11 SVRE B12 ESTOP B12 ESTOP B13 ALARM B13 ALARM CN1 DC24V CN5 DC24V 27 - 7
DRIVE ON B1 OUT0 B2 OUT1 B3 OUT2 RESET ON OFF ()OFF B4 OUT3 B5 OUT4 B6 OUT5 B7 BUSY ON () BUSY OFF BUSY 50ms ON B8 AREA 1~2ON B9 SETON SETON()ON OFF B10 INP INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON (100 80 401 () INP [ON] 100 80 1 40 SV1.00 25 - B10 INP <> SV1.00 ,INP OFF 100 80 401 () INP [OFF] INP [ON] 100 80 1 40 EMGRESET (BUSY OFF) INP ON B11 SVRE
115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
B2 B1B2(VAR) (2) (3) (a) R[]:() L[H]:() Vb[V]: DC24V U Vs[V] N () 14.1.2 14 2 14.
plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !
G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings