Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

Dual Speed Controller with One-touch Fitting Series ASD 1

L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

ASD

L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

15 16 17 18 19 20 41 54 75 85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2 L3 L4

Table of Contents

Note 2) 2-4-16 17 Body Ported Series VQ1000 Plug-in Unit: Flip Type 23.5 L2 6.2 41 L1 35 P = 11 13.2 1.5 Indicator light 19.5 (11) 1.5 Mounting hole size Mounting hole size Manual override 2-M4 mounting hole 9 (35) PCW type VQC R4.5 97 SQ (5.5) 62.5 61.5 VQ0 26 VQ4 4.5 52 (L3) (5.2) (L4) VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Modular F.R.L. Unit

93 98 98 L2 48 61 76 76 99 104 124 124 129 L2 61 76 76 99 L3 43 57 57 75 L3 57 74 74 95 L3 57 74 74 95 L1 41.5 55 55 72.5 L2 43 57 57 75 L4 43 57 57 75 L1 41.5 55 55 72.5 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 KSV KTV KSTV ST SV STV TV L2 61 76 76 99 Attachment Model 55 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L4 43 57 57 75 L1 41.5 55 55 72.5 L2 61 76 76 99

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 Metric sizes: Light gray Inch sizes: Orange D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-23 4 12.8 10.4 56 20.3 32.2 21.9 15.7 15.8 25.2 VR1210F

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. load current: 80 mA, Internal voltage drop: 1.5 V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 C6: Onetouch fitting for 6 VVQZ200010A2 VV5QZ2205C 1.12-19 VQZ1000/2000/3000 Body Ported Dimensions: VQZ1000 VV5QZ12 C Station Grommet (G) 27.5 (11) (35) 44.5 Mounting holes (5.5) n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread 20 (7.5) DIN rail clamp screw U side n 5 4 4 4 4 4 SMC SMC 14 P=10.5 2 2 2 2 (L4) (L3)

Shuttle Valve/AND Valve with One-Touch Fittings

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] L4 [mm] L4 [mm] L4 [mm] m Me L4 600 600 1000 1000 X Motorless 400 400 500 500 200 200 LAT 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 LC3F2 800 800 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

EX500-GPR1A.eng

L2 ( Rail mounting pitch: 12.5 ) 87.5 100 112.5 125 137.5 150 162.5 175 12 12 12.5 12.5 13 13 13.5 13.5 74 86 98 110 122 134 146 158 98 110.5 123 135.5 148 160.5 173 185.5 135.5 185.5 L1 L3 (L4) 12.5 13.5 110 158 125 175 DIN Rail (7.5) 5 49 32.2 39.7 1 2 3 L4 [mm] L3 [mm]: Manifold length L2 [mm]: Mounting pitch L1 [mm]: Rail length Installation When only input blocks for M12 connector are

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 D3 L4 Max. Min. Max. Min.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

[mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg]

0.01

ZSM1 With DIN rail L1 5 38 3 38 L2 LED level meter Lead wire connector End plate L EXH port EXH port End plate R 3 0 3 0 3 0 center DIN rail 92 Setting dial P P P T T T U U U E E E L L L S S S L L L 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge Rc, NPT, G 1/8 SUP port Plug DIN rail mounting bracket 24 L3 11.2 5.3 L4 L5 n Stations

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.