RLQ

Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping (The

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m1, m2, m3 max.

MHF2

) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x

MHF2

5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

nickel plated Round head combination screw M3 x 31, Matt nickel plated Blanking plate SYJ700-10-2 Gasket SYJ700-5-1 Gasket Gasket SYJ700-5-3 SYJ700-5-4 Applicable base Sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7-42R Applicable base SS3YJ7-20 SS3YJ7-21 SS3YJ7-21R Manifold base Manifold base Caution Mounting screw tightening torques M3: 0.8 Nm Use caution to the assembly orientation

MHZ

Series MHZJ2 Dimensions MHZJ2-6 Double acting/Single acting Basic type 10 0.05 (14) 2-M3 x 0.5 through (Mounting thread) Prepared hole dia. 2.6 through (Mounting hole) 4 0 0.1 When open 12 1 12 20 (28) 0 0.05 When closed 8 0 0.4 +0.022 0 depth 1.5 25.5 7H8 11 28.7 53 4-M2 x 0.4 (Thread for mounting attachment) M3 x 0.5 (Finger closing port) M3 x 0.5 (Finger opening port) Auto Switch Mounting

MHZ

MHW Option MRHQ Body Option/End Boss Type Type of piping port MHZA2-6/MHZAJ2-6 M3 x 0.5 M3 x 0.5 With 4 One-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

0.4

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit (Circular connector) T kit (Terminal block box) S kit (

CXS

13 3 3 2-3.4 through 2-6.5 counterbore with depth 3.3 M3 x 0.5 x 5 (Hexagon socket head set screw) OUT 1 3.2 5.6 0.2 28 0.2 22.7 (16) 16 37 35 28 6.3 5 M2.5 x 0.45 x 6 (Hexagon socket head cap screw) M3 x 0.5 x 12.5 (Hexagon head bolt) M3 x 0.5 (Hexagon nut) 6 7 2-M5 x 0.8 with depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through) 2-M3 x 0.5 (Through) S (13 + ST) 10 2-M3 x 0.5 with depth 4.5 (

Thermo-chiller

Cooling Capacity HRS100-A -20/40(50 Hz) HRS100-A -20/40(60 Hz) 14 14 12 12 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 90F (32C) Ambient temperature 104F (40C) Ambient temperature 104F (40C) 8 8 6 6 4 4 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5]

4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R

MGP

14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8 Rc1/8 Rc1/4 Rc1/4 7 13 9 14 32 40 50 63 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 66 44 14 14 M8 X 1.25 M8 X 1.25 18 10 72 44 14 12 M10 X 1.5 M10 X 1.5 21.5 11 M10 77 49 16.5 16.5 M10 X 1.5 M10 X 1.5 28 13.5 WA R S T U VA VB WB Bore (mm) X XA XB XC XL YY YL Z 25st< 100st 300st< 100st< 200st 200 200 200 200 200st< 300st 33 34 36 38

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

SMC Pneumatic Clean Series

C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18

Vacuum Unit

PE EXH Common Port open to atmosphere *1 PS 4 5/32" PD *2 M3 M3 : Not applicable 1 Air is also exhausted from the pilot valve when the valve type is R. Piping for PE port is available as an option (M3). (Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

782 MXS 1322Air Slide Table Dimensions: MXS8 1322Basic 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 7 2 Vacuum suction port M5 x 0.8 5.5 J 6 Max. 9.5 (Stroke adjuster at retraction end) I 8 6.5 4 6.5 7 7 3.5 3.8 NA x M3 x 0.5 thread depth 4 14.6 K 7 3.8 KA 14.6 22 (With stroke adjuster at extension end) Stroke adjuster at extension end Stroke adjuster at retraction end N x M3 x

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

CE

5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5 49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.