VQ5000

4 (A) port 13.52 (B) port 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U 19.5 22.5 24.5 27.5 31.5 35 41 47.5 U 23 26 28 31 35 38.5 44.5 51 U 26 29 31 34 38 41.5 47.5 54 U 22 25 27 30 34 37.5 43.5 50 12 16 20 25 32 40 50 63 7-6-83 84 Series CQ2KW Dimensions: 12 to 32/Without Auto Switch Basic style (Through-hole): CQ2KWB 12, 16 20, 25 12 to 25 2-H thread effective depth C (Also back cover) 2-N through (Port size) Piston rod cross section Width across flats K2

CQ2

Bore (mm) C1 X H1 L1 12 16 20 25 10.5 12 14 17.5 M5 X 0.8 M6 X 1.0 M8 X 1.25 14 15.5 18.5 22.5 9 10 12 15 M10 X 1.25 Standard (mm) 10st A 10st B Bore (mm) E E2 I K M L N D C E1 O U W H F S 5st 5st 38 40.5 41.5 42.5 6.5 Depth 3.5 12 16 20 25 36.5 39 41 42.5 41.5 44 46 47.5 33 35.5 36.5 37.5 23 26 30 33 13 15 17 19.5 14 17 19 22 7 8.5 10.5 12 32 38 47 52 5 6 8 10 22 28 36 40 3.5 3.5 5.5 5.5

Table of Contents

Back port (Refer to P . 8-12-3.)

Air Slide Table

Page 29 16 Page 35 20 Page 41 25 Page 47 When the features as shown below are required for 8 and 12 sizes, refer to the MXQC, single side-ported type as well.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

Electric Actuator/Slider Type

Note 12) For an actuator with lock, add the power consumption for the lock.

ZX

to plug connector Y 24 VDC and 12 VDC are applicable to 0.45 W.

Floating Joint

-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

Table of Contents

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

ZP

width across flats (M6: 8, M8: 12) ZX Hexagon widthacross flats 12 Hexagon widthacross flats 12 ZR Applicable tubing O.D.

ZP

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-43 Series SYJ5000 Type 41: Side Ported/SS5YJ5-41Stations -M5 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override 2-5.5 (For mounting) 12

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 Auto switch model D-F5l D-J59 D-F5lW D-J59W D-F5BA D-F59F D-F5NT D-A3lC D-G39C D-K39C D-A44C Bore size Hs Ht Hs Hw Hs Hw 40 38 31.5 73 69 81 69 50 42 35.5 78.5 77 86.5

Air Cylinder

(17.5) 1/2 40 37 128 41 60 30 50 3 14 14 100 71 16 110 M12 x 1.75 10 With Rod Boot (mm) (mm) With Air Cushion (mm) Bore size Rc, NPT port WA WB W WH GA GB P 20 12 10 (12) M5 x 0.8 16 15 (16) 25 1.5 25 12.5 10 (12.5) M5 x 0.8 16 14.5 (16) 25 1.5 32 12 10 (12) 1/8 16 14 (16) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20

ZP

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.