NCA1

t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod * C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact SMC Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB

CQM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IB RQ IA 2-N through MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Support Block Model LEYG S 025 Size 025 For size 25 032 For size 32 Support block Support block Body mounting screw EB X 2 x OA thread depth OB 2 x G through ST (0.5) GA WC + Stroke Caution Do not install the body using only a support block. The support block should be used only for support.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

15

Dimensions: In-line Motor LEYG25, 32 Rod operating range Note) 4 x OA through 2 x FA thread depth FB FD depth FE FC Section XX1 (Stroke + 4 mm) Motor Motor flange EV S Q U H GA LEF J Y (EB) FG EH T EB X LEJ C EC ED 0.5 XA H9 depth XA LEL B + Stroke FF LEM L + Stroke Section XX1 4 x OA thread depth OB Bottom hole G through XA H9 depth XA DB LEY XAH9 2 x NA thread depth NC LES DA X C EC ED

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2

VQ4000

) VQD 1 4/2 (P A/B) 2 position rubber seal 1 2 VQ4 51 4/2 5/3 (A/B EA/EB) Note) Port size: Rc 3/8 Manifold Option Refer to pages 2-5-34 to 2-5-38 for detail dimensions of each option.

Air Cylinder NCA1 Series

t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod * C9 Adjustable Stroke Return Piston Rod * C10 Dual Operation/Double Piston Rod * C11 Dual Operation/Single Piston Rod * C12 Tandem Cylinder* * (Contact P/A Customer Service) M O U N T I N G / S I N G L E R O D O N LY EA EB

Multistage Ejector (N)ZL Series

1MPa = 145 psi 1kPa = 0.145 psi Pmax Vacuum pressure P1 Qmax Q1 Suction flow rate 3 Series (N)ZL Multistage Ejector How to Order N ZL1 12 K1 12 25 5 M Z E With valve Without valve N ZL1 Fitting Size Lead wire length Air Supply Port Vacuum Port 6 12 1/4" 1/2" Nil N 0.5m 2.9m Nil L 1.2mm 12 Nozzle diameter Digital vacuum pressure switch specifications Exhaust specifications For E (ZSE4) EB

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

Table of Contents

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Multistage Ejector Series ZL112/212 1

Note 2) Fixed unit: kPa Built-in silencer Port exhaust Nil P Vacuum pressure sensor Digital vacuum pressure switch specifications Nil GN G E EB EE None Adaptor Rc 1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E For E (ZSE4) EB (ZSE4B) 25 26 65 Lead wire length 0.6 (3.0) m Lead wire

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Ea Ea Ea Ea C2 C1 K2 (screw length) B2 F2 B1 F1 Detail drawing of Za1 (adjustable range) Detail drawing of Za2 (adjustable range) K1 (screw length) Q2 P Zb2 JJ Eb Eb Q1 Zb1 JJ H H Eb Eb P A2 A1 L (Counterbore depth) Detail drawing of Zb2 (adjustable range

VFRA3000

port) (P , A, B port) (EA, EB port) 03 04 03 04 03 04 3 position closed center: VFRA43113 position exhaust center: VFRA44113 position pressure center: VFRA4511(Pilot port) Main valve manual override (Direct manual) (Mounting hole) (Pilot port) (P , A, B port) (EA, EB port) 5-3-24

Multistage Ejector Series ZL

supply valve/ release valve With supply valve Built-in silencer Port exhaust ZL112 100 63 ZL212 200 126 Features Multistage Ejector Series ZL112 How to Order ZL1 12 K1 12 25 5 M Z E With valve Without valve ZL1 Lead wire length 1.2mm 12 Nozzle diameter 0.5m 2.9m Nil L Digital vacuum pressure switch specifications Exhaust specifications Built-in silencer Port exhaust Nil P For E (ZSE4) EB

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

150 119 82 10 20 30 40 130 140 320 48 ISO Standards Air Cylinder: Standard Type Double Acting with End of Stroke Cushioning Series CP96 Dimensions Axial foot (L) XA + Stroke Series C85 Series CP96 Series C96 Series C55 AH 4 x AB E1 TR AT AO AO SA + Stroke Rod flange (F) 4 x FB R E2 TF UF W MF Head flange (G) ZF + Stroke MF CD Single clevis (C) Double clevis (D) L XD + Stroke MR EW CB UB EB

Cylinder with Lock

Single clevis: CP96NC Double clevis: CP96ND CD EB UB CB EW MR L XD + Stroke Double clevis Single clevis [mm] Bore size CBH14 CDH9 EB EW L MR UBh14 XD 32 26 10 65 26 0.2 0.6 12 9.5 45 200 40 28 12 75 28 0.2 0.6 15 12 52 226 50 32 12 80 32 0.2 0.6 15 12 60 245 63 40 16 90 40 0.2 0.6 20 16 70 269.5 80 50 16 110 50 0.2 0.6 20 16 90 320 100 60 20 140 60 0.2 0.6 25 20 110 353.5 Pivot Bracket: Double

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

LZ LL EB Cylinder mounting center Guide center, Workpiece mounting center XAH7 Adjustment bolt (Retraction end with no adjustment) Note 1) Oval hole depth XL PC approx. T EA XY QB Note1) PB EA approx. T QW EB Adjustment bolt MAX. approx.

Low Profile Guide Type

LZ LL EB EA Cylinder mounting center (Retraction end with no adjustment) Adjustment bolt Guide center, Workpiece mounting center Oval hole depth XL 6 x YB through hole PC approx. T Note 1) XY QB PB approx. T Note1) EA QW EB Adjustment bolt Max. approx.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.