Table of Contents

25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse pressure): VQ7-8-YZ-S-SC 154 154 71.5 82.5 82.5 56(71) 56(71) 49(64) 49(64) 16(20)(B port) 16(20)(A port) 31(42) 31(42) Mounting hole 2-7.5 P R2 R1 VK Manual override A B PB (11) 10 12 (16) 16 (23) (22) 16 VZ 62(72) 75(86) 62(72) 75(86) 50 A

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

stations Pilot valve (V111) Adapter plate For 1 to 8 stations 20 41 42 43 Existing valve 10-SS5YJ5SA For 9 to 12 stations (Orange) Manual override For 13 to 16 stations + B A For 1 to 8 stations Interface 10-SS5Y7SA 21 41 For 9 to 12 stations For 13 to 16 stations Note 1) The above is for station addition or maintenance.

Table of Contents

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

4/5 Port Air Operated Valve Series SYJA3000

Individual SUP spacer SJ7000-16-2 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

ISO Cylinder

25 26 35 12.8 23.8 91.5 (97.5) 10 4.5 5 11 86.5 (90.5) 3.2 16 25 26 35 12.8 23.8 91.5 (95.5) 12 5.5 6 14 98 (101.5) 4 20 32 33 42 18 32 106 (109.5) 16 5.5 6 14 103 (106.5) 129 (132.5) 155 (158.5) 4 20 32 33 42 18 32 111 (114.5) 137 (140.5) 163 (166.5) 20 6.6 8 17 121 146 171 5 25 40 42 54 19 36 128 153 178 25 6.6 8 17 122.5 147.5 172.5 5 25 40 42 54 23 40 133.5 158.5 183.5 ( ):

SYJ3000/5000/7000

Individual SUP spacer SJ7000-16-2 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

Fluoropolymer Piping Equipment

Inch Size Model E E H L1 L1 L2 L2 M P Q R S T W N Min. port size LQ3F2B 17 16 16 32.1 30.9 56.1 54.9 20 58 42 43 14 10 14 4 4 LQ3F4B 24.5 22.5 24 49 46.8 73 70.8 29 58 42 43 14 10 22 9.5 9.5 LQ3F4C 69 LQ3F5A 26.5 24 32 58 55.3 80 77.3 37 53 42 43 12 10 30 16 16 LQ3F5B 82 79.3 58 14 LQ3F5C 69 LQ3F6B 30 26 41 68.5 64.2 92.5 88.2 49 58 47 48 16 10 36 22 22 LQ3F6C 69 55 56 LQ3F6D 94.5 90.2 84

CQS

switch A 40.5 41.5 51 57.5 Bore size (mm) Stroke range (mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

16-2 Applicable manifold base SS5YJ7-40 SS5YJ7-41 SS5YJ7-42 Gasket DXT199-21-7 R1 Gasket 2-Rc(PT)1/8 DXT199-21-7 (SUP port) Dust cap SY3000-42-1 Applicable manifold base SS5YJ7-40 SS5YJ7-41 SS5YJ7-42 Applicable manifold base SS5YJ7-21P Refer to p.1.2-7 prior to handling 1.2-65 Series SYJ7000 20 Type Manifold: Top Ported/SS5YJ7-20Station Grommet(G), (H) (Mounting holes) 4-4.5 Manual override

Floating Joint

0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 30 42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41

F

KQR06-12 12.8 42 20 17 13.1/13.1 5/16 9.5(3/8) KQR09-11 16 45.5 25 18.5 6 8 10 KQR08-10 15.2 41 20 18.5 26.1/18 5/16 12.7(1/2) KQR09-13 16 42.5 21 18.5 6 8 12 KQR08-12 15.2 42 20 18.5 26.1/18 3/8 12.7(1/2) KQR11-13 48 44.5 22.5 21 7 10 12 KQR10-12 17 42 20 21 41.5/32.8 10 16 KQR10-16 21 50.5 26.5 21 41.5/(29.5) 12 16 KQR12-16 21 50.5 26.5 22 58.3/(46.1) Note: ( ) Dimensions are for Soft Nylon

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

JA/JAH/JB/JS

-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101 120 152 178 191 18 18 24 38 42 49 1.25 2 2 2.5 3 3 11000 18000 28000 54000 71000 71000 0.58 1.08

JA/JAH/JB/JS

-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101 120 152 178 191 18 18 24 38 42 49 1.25 2 2 2.5 3 3 11000 18000 28000 54000 71000 71000 0.58 1.08

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore Y X NN LT LH LC LB LY LX CB CA BB A BA KA H GA F LZ NB NA MM 10 16 9 6 25 33 2.3 14 5.5 21.5 4.2 28 8 8 14 17 12 15 15 M10 X 1.0 5.5 12.5 42 M4 X 0.7 9 6 25 33 2.3 14 5.5 23 5.2 28 8 8 20 20 18 15 18 M12 X 1.0 5.5 12.5 42 M5 X 0.8 Dimensions by stroke Symbol S Z Stroke 5 to 15 48.5 48.5 16 to 30 56 57 31 to 45 68 69 46 to 60 80 81 61 to 75 87

Free Mount Cylinder

7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46 50 52 Z 51

ZP

Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5

MGP

Standard dimension E st30 3016 27 32 51 51 69 68.5 20 25 (mm) Standard dimension E st50 5016 16 20 20 58.5 52 62 57 80.5 74 89 84 21.5 15 21 16 38.5 32 42 37 32 40 50 63 (mm) Standard dimension E st30 30

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,