o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

[74] 51.6 35 27 8 24 (Pitch) P=19 21 1/8 (A port) 49

Tamper Proof and Flat Head Screw

55.3 49.3 21.8 R 1/4 19 1.5 23 9.5 AS321F-N02-07ST AS321F-02-10ST 18.5 1/4" 13.2 27.8 39.3 17 31.8 10 21 43.3 AS321F-N02-09ST AS321F-02-12ST 23 9.5 NPT1/4 19 20.9 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8 6 17 39.3 AS321F-N03-07ST AS321F-03-08ST 15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5

Series SV

center/pressure center [M12 waterproof connector type] SV100(R)-W-01 13.3 14.5 13.5 62.6 51.8 14.3 35 19 19 2-3.2 M5 x 0.8 (External pilot port) 17 17 (Mounting hole) 3 A B 22 A B SMC B A PE X EB EA P Manual override (non-locking) A side: Orange B side: Green (Light/Surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof

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LJ I I~ ,L (mm) ;A . .8 (mm) Model ZPY40B 'A 40 .8 G:M6Xl G:M8 Xl.25 .K .L G:M6Xl F K L Y Model A B C 0 E F 0 E Y C F F 43 34 62 44 16 24.4 46 ~.to 13 12162642 6 ZPY50B 50 53 38 ,46 66 ' 8 12.4 . 57 19.~ 15 . . 5 6 16 18 2C 3C 46 . tube tube P R tube, ' 412.51 14.5 .8 tube; <:11/41 le.5 W , tube, " 12.51 14.5 1.8 , tube. '6/41 16.5 7 2.5 31 Specifications .

Cylinder with Lock Series MNB

40 32 20 14 90 63 to 600 35 27 11 1/4 17.5 18 75 134.5 68 12 56.5 119.5 16.5 23 45 37 25 20 102 80 to 750 40 32 13 1/4 22 22 95 169 81 18 72 150 19 33 45 37 30 20 116 100 to 750 40 41 16 1/4 25 26 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) 34 205 32 88.5 18.3 M6 x 1.0 4 6 27 154 6.5 4 M10 x 1.25 1/8 37 47 13 6.5 39.5 216 40 96.5 19.5 M6 x 1.0

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

MB

to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143 152 168 168 208 208 100 110 118 118 150 150 151 165 180 180 226 226 6-6-37 37 Series MBB With Mounting Bracket Foot(L)/Locking at head end (-H) -W -H/ -R (mm) Port Cushion valve Stroke range Bore size

Rotary Actuator/Vane Type

[mm] Size CRB2 CRBU2 Y X Y X 10 12 (3) 10 (19) 19 (10) 3 (12) 15 15.5 11.5 20.5 6.5 20 17 13 22.5 7.5 30 19 16 26.5 8.5 40 28 17 36 9 Symbol: X5 Specifications with connection port size of sizes 10 and 15 changed to M5 The rotating angle is only 90 and 180. The vane type is compatible with single vanes only.

Series KP/KPQ/KPG

7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58 46 31.4 L1 22 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58 46 31.4 L1 22 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Speed Controller with Indicator

16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

SOL.A 19 Station 10 SOL.B 20 SOL.A 21 Station 11 SOL.B 22 SOL.A 23 Station 12 SOL.B 24 COM. Triangle mark indicator position 25 COM. 26 Note) Positive COM spec. Electrical wiring specifications Negative COM spec. Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

SOL.A 19 Station 10 SOL.B 20 SOL.A 21 Station 11 SOL.B 22 SOL.A 23 Station 12 SOL.B 24 COM. Triangle mark indicator position 25 COM. 26 Note) Positive COM spec. Electrical wiring specifications Negative COM spec. Note) For CE compliant models, DC-type only.

Cylinder with Lock

Locked Manual lock released Refer to page 41 for the manual lock release.

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41